Presentation 1994/5/20
Electrical effects of growth interruption in Liquid-Phase Epitaxial Al_xGa_1-x>Sb
Hiroyasu Ogino, Masaya Ichimura, Akira Usami, Takao Wada,
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Abstract(in English) When a pn junction is grown by liquid-phase epitaxy(LPE),the growth is inevitably interrupted at the junction.In this study, electrical properties of LPE grown n-type Al_xGa_1-x>Sb with a growth-interruption interface were investigated by current- voltage(I-V)and deep level transient spectroscopy(DLTS)techniques. We found that when the growth was interrupted,reverse current of AI Schottky diodes had only weak tendency of saturation.After an annealing,reverse I-V characteristics exhibited much clearer saturation.In the case of sgmples with an interruption interface, deep electron traps reland to the interface were detected by DLTS but not detected after the annealing.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) Al_xGa_1-x>Sb / Liquid Phase Epitaxy / growth-interruption interface / current-voltage characteristic / deep level transient spectroscopy technique
Paper # ED94-27,CPM94-28
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Committee ED
Conference Date 1994/5/20(1days)
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Language JPN
Title (in Japanese) (See Japanese page)
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Title (in English) Electrical effects of growth interruption in Liquid-Phase Epitaxial Al_xGa_1-x>Sb
Sub Title (in English)
Keyword(1) Al_xGa_1-x>Sb
Keyword(2) Liquid Phase Epitaxy
Keyword(3) growth-interruption interface
Keyword(4) current-voltage characteristic
Keyword(5) deep level transient spectroscopy technique
1st Author's Name Hiroyasu Ogino
1st Author's Affiliation Department of Electrical and Computer Engineering,Nagoya Institute of Technology()
2nd Author's Name Masaya Ichimura
2nd Author's Affiliation Department of Electrical and Computer Engineering,Nagoya Institute of Technology
3rd Author's Name Akira Usami
3rd Author's Affiliation Department of Electrical and Computer Engineering,Nagoya Institute of Technology
4th Author's Name Takao Wada
4th Author's Affiliation Daido Institute of Technology
Date 1994/5/20
Paper # ED94-27,CPM94-28
Volume (vol) vol.94
Number (no) 47
Page pp.pp.-
#Pages 6
Date of Issue