| Presentation | 1994/5/20 Consecutive growth of Ge/GaAs from Ga-As-Ge solution Toshiyuki Kamiya, Masakazu Kimura, Akira Tanaka, Tokuzo Sukegawa, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | The growth layers precipitated on GaAs(100)substrates from Ga-As- Ge solution has been investigated.Two layers were observed in the grown layer,obviously.The first layers with about 20μm thickness c onsisted of GaAs,and the very thick second layers were composed of Ge.The results of X-ray diffraction measurement indicated that these were epitaxial layers.The GaAs epi.layers and the Ge epi. layers were p-type and low resistivity.Both layers had uniform resistivitys along growth direction,respectivery.These results indicated that a p^+ GaAs epi.layer and a p^+ Ge epi.layer could be grown consecutively from Ga-As-Ge solution.This growth method, which can be utilize inverse epitaxy is promissing for fabrication technique of GaAs power devices. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | GaAs / Ge / eutectic / hetero-structure / Ga-As-Ge solution / epitaxial |
| Paper # | ED94-24,CPM94-25 |
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| Conference Information | |
| Committee | ED |
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| Conference Date | 1994/5/20(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
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| Vice Chair | |
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| Paper Information | |
| Registration To | Electron Devices (ED) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Consecutive growth of Ge/GaAs from Ga-As-Ge solution |
| Sub Title (in English) | |
| Keyword(1) | GaAs |
| Keyword(2) | Ge |
| Keyword(3) | eutectic |
| Keyword(4) | hetero-structure |
| Keyword(5) | Ga-As-Ge solution |
| Keyword(6) | epitaxial |
| 1st Author's Name | Toshiyuki Kamiya |
| 1st Author's Affiliation | Research Institute of Electronics,Shizuoka University() |
| 2nd Author's Name | Masakazu Kimura |
| 2nd Author's Affiliation | Research Institute of Electronics,Shizuoka University |
| 3rd Author's Name | Akira Tanaka |
| 3rd Author's Affiliation | Research Institute of Electronics,Shizuoka University |
| 4th Author's Name | Tokuzo Sukegawa |
| 4th Author's Affiliation | Research Institute of Electronics,Shizuoka University |
| Date | 1994/5/20 |
| Paper # | ED94-24,CPM94-25 |
| Volume (vol) | vol.94 |
| Number (no) | 47 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |