Presentation 1994/5/20
Fabrication of AlGaAs/GaAs Double-Hetero structure LD on GaAs(lll) A Substrate
Yutaka Niwano, Takashi Egawa, Kazuhisa Fujita, Kohichi Nitatori, Toshihide Watanabe, Takashi Jimbo, Masayoshi Umeno,
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Abstract(in Japanese) (See Japanese page)
Abstract(in English) Amphoteric nature of Si has been reported in growth of GaAs and AlGaAs by MBE.This amphoteric characteristic of Si has been mainly used as a current confinement in fabrication of lateral GaAs p-n junction on a patterned substrate.Although the growth of AlGaAs on planar GaAs(lll)A substrate is important for device applications such as LED and laser diode,there are problems in surface morphology,heterointerface,conduction type and carrier concentration.In this study,we demonstrate 300 K DC operation of AlGaAs, GaAs double-heterostructure(DH)LED on GaAs(lll)A-5゜- misoriented substrae using only Si dopant for the first time.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) MBE / GaAs(lll)A substrate / only Sidopant / AlGaAs/aAs DH Structure / LED
Paper # ED94-21,CPM94-22
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Committee ED
Conference Date 1994/5/20(1days)
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Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Fabrication of AlGaAs/GaAs Double-Hetero structure LD on GaAs(lll) A Substrate
Sub Title (in English)
Keyword(1) MBE
Keyword(2) GaAs(lll)A substrate
Keyword(3) only Sidopant
Keyword(4) AlGaAs/aAs DH Structure
Keyword(5) LED
1st Author's Name Yutaka Niwano
1st Author's Affiliation Department of Electrical and Computer,Nagoya Institute of Technology()
2nd Author's Name Takashi Egawa
2nd Author's Affiliation Research Center for Micro-Structure Devices,Nagoya Institute of Technology
3rd Author's Name Kazuhisa Fujita
3rd Author's Affiliation ATR Optical and Radio Communications Research Laboratories
4th Author's Name Kohichi Nitatori
4th Author's Affiliation ATR Optical and Radio Communications Research Laboratories
5th Author's Name Toshihide Watanabe
5th Author's Affiliation ATR Optical and Radio Communications Research Laboratories
6th Author's Name Takashi Jimbo
6th Author's Affiliation Research Center for Micro-Structure Devices,Nagoya Institute of Technology
7th Author's Name Masayoshi Umeno
7th Author's Affiliation Department of Electrical and Computer,Nagoya Institute of Technology
Date 1994/5/20
Paper # ED94-21,CPM94-22
Volume (vol) vol.94
Number (no) 47
Page pp.pp.-
#Pages 6
Date of Issue