| Presentation | 1994/5/20 Excimer Laser Doping of Erbium Adsorbed in Porus Silicon Structure Kenshiro Nakashima, Osamu Eryuu, Naoki Ikeuchi, Hironori Oowaki, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Erbium-doping by the excimer laser irradiation has been investigated in porus silicon adsorbed with ErCl_3.Rutherford backscattering measurements show that Er atoms are adsorbed uniformly on the porus silicon structure,and that the doped layers with a peak Er concentration of 7.2X10^20>cm^-3> are formed in the 500 nm surface region.RBS and photoluminescence(PL) measurements suggest that porus silicon structures still remain after the single shot of laser irradiation.Proper heat treatments activate Er optical centers to emit sharp luminescence lines characteristic of Er atoms.It is suggested that porus silicon structures provide promising materials suitable for the strong emission of Er-ines at room temperature. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Porus silicon / Erbium / laser doping / photo luminescence / Rutherford backscattering |
| Paper # | ED94-19,CPM94-20 |
| Date of Issue |
| Conference Information | |
| Committee | ED |
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| Conference Date | 1994/5/20(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
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| Paper Information | |
| Registration To | Electron Devices (ED) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Excimer Laser Doping of Erbium Adsorbed in Porus Silicon Structure |
| Sub Title (in English) | |
| Keyword(1) | Porus silicon |
| Keyword(2) | Erbium |
| Keyword(3) | laser doping |
| Keyword(4) | photo luminescence |
| Keyword(5) | Rutherford backscattering |
| 1st Author's Name | Kenshiro Nakashima |
| 1st Author's Affiliation | Nagoya Institute of Technology() |
| 2nd Author's Name | Osamu Eryuu |
| 2nd Author's Affiliation | Nagoya Institute of Technology |
| 3rd Author's Name | Naoki Ikeuchi |
| 3rd Author's Affiliation | Nagoya Institute of Technology |
| 4th Author's Name | Hironori Oowaki |
| 4th Author's Affiliation | Nagoya Institute of Technology |
| Date | 1994/5/20 |
| Paper # | ED94-19,CPM94-20 |
| Volume (vol) | vol.94 |
| Number (no) | 47 |
| Page | pp.pp.- |
| #Pages | 8 |
| Date of Issue | |