| Presentation | 1994/5/20 Redistribution of Er atoms in Si during Laser Doping Osamu Eryu, Hironori Ohwaki, Kenshirou Nakashima, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | The distribution and the location of Er atoms in Si,which have been doped by means of pulsed laser doping method with an Excimer laser(λ=248nm,τp=20ns)and a Dye laser(λ=584nm,τp=500ns),is dete rmined using Rutherford backscattering spectrometry and the angular yield-profile measurements of channeling.Crystallinity of Si at the Er doped region have also been investigated.These experiments proved that the lattice location of Er atoms strongly depend on the pusled laser parameters.That is,clustering of Er atoms has been occurred within a Si by Excimer laser irradiation, while the ordering of Er atoms at the location of hexagonal sites and tetrahedral sites in Si has beenobserved in the case of Dye laser inadiation. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | pulsed laser doping / Rutherford backscattering spectroscopy / channeling |
| Paper # | ED94-18,CPM94-19 |
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| Conference Information | |
| Committee | ED |
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| Conference Date | 1994/5/20(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Electron Devices (ED) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Redistribution of Er atoms in Si during Laser Doping |
| Sub Title (in English) | |
| Keyword(1) | pulsed laser doping |
| Keyword(2) | Rutherford backscattering spectroscopy |
| Keyword(3) | channeling |
| 1st Author's Name | Osamu Eryu |
| 1st Author's Affiliation | Department of Electrical and Computer Engineering,Nagoya institute of Technology() |
| 2nd Author's Name | Hironori Ohwaki |
| 2nd Author's Affiliation | Department of Electrical and Computer Engineering,Nagoya institute of Technology |
| 3rd Author's Name | Kenshirou Nakashima |
| 3rd Author's Affiliation | Department of Electrical and Computer Engineering,Nagoya institute of Technology |
| Date | 1994/5/20 |
| Paper # | ED94-18,CPM94-19 |
| Volume (vol) | vol.94 |
| Number (no) | 47 |
| Page | pp.pp.- |
| #Pages | 8 |
| Date of Issue | |