| Presentation | 1994/5/20 Thermal annealing effects of Er lumnescence centers in Er doped Si Hironori Ohwaki, Osamu Iioka, Hideo Minami, Osamu Eryu, Kensiro Nakashima, |
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| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | The electronic excitation processes of rare-earth elements Er doped into Si by pulsed laser irradiation have been investigated by means of the photoluminescence spectroscopy method.The results of the photoluminescence measurements prove that new luminescence centers are produced by annealing after laser irradiafion,and that PL spectra are different between before and after annealing.An analysis of PL spectra after annealing shows that Er luminescence centers are in tetrahedral hexagonal and the other sites of Si lattice.In back side excitation photoluminescence measurements,the same spectra,as in the case of optical direct excitation,emerge even by the indirect excitation for Er luminescence centers.These results suggest do excitation rate of Er luminescence centers in Si is independent of their sites. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | rare-earth / Erbium / laser doping / photoluminescence |
| Paper # | ED94-17,CPM94-18 |
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| Conference Information | |
| Committee | ED |
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| Conference Date | 1994/5/20(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
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| Vice Chair | |
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| Paper Information | |
| Registration To | Electron Devices (ED) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Thermal annealing effects of Er lumnescence centers in Er doped Si |
| Sub Title (in English) | |
| Keyword(1) | rare-earth |
| Keyword(2) | Erbium |
| Keyword(3) | laser doping |
| Keyword(4) | photoluminescence |
| 1st Author's Name | Hironori Ohwaki |
| 1st Author's Affiliation | Department of Electrical and Computer Engineering,Nagoya institute of Technology() |
| 2nd Author's Name | Osamu Iioka |
| 2nd Author's Affiliation | Department of Electrical and Computer Engineering,Nagoya institute of Technology |
| 3rd Author's Name | Hideo Minami |
| 3rd Author's Affiliation | Department of Electrical and Computer Engineering,Nagoya institute of Technology |
| 4th Author's Name | Osamu Eryu |
| 4th Author's Affiliation | Department of Electrical and Computer Engineering,Nagoya institute of Technology |
| 5th Author's Name | Kensiro Nakashima |
| 5th Author's Affiliation | Department of Electrical and Computer Engineering,Nagoya institute of Technology |
| Date | 1994/5/20 |
| Paper # | ED94-17,CPM94-18 |
| Volume (vol) | vol.94 |
| Number (no) | 47 |
| Page | pp.pp.- |
| #Pages | 7 |
| Date of Issue | |