| Presentation | 1994/5/19 Preparation of CuIn_xGa_1-X>Se_2 thin Films on Si substrates Toshiyuki Yamaguchi, Masayoshi Suzuki, Yukio Yamamoto, Yasutaka Demizu, Akira Yoshida, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | For fabricating a tandem solar cell,CuIn_xGa_1-X>Se_2 thin films were prepared on Si(100),(110)and(111)substrates in the temperature range of RT-400℃ by rf sputtering.From EPMA analyses,t hese sputtered thin films had nearly stoichiometric composition, although the slight deficiencies of Cu,In and Se were observed with increasing the substrate temperature.XPS study showed that the compositional depth profile of these thin films was uniform.X- ray diffraction analyses indicated that all thin films had a chalcopyrite structure.CuIn_xGa_1-X>Se_2 thin films were strongly oriented along the(112)plane and the crystallinity was improved with the increase of substrate temperature,independent of the plane azimuth of Si substrate. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | tandem solar cell / rf sputtering / Si substrate / CuIn_xGa_1- X>Se_2 thin film |
| Paper # | ED94-11,CPM94-12 |
| Date of Issue |
| Conference Information | |
| Committee | ED |
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| Conference Date | 1994/5/19(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Electron Devices (ED) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Preparation of CuIn_xGa_1-X>Se_2 thin Films on Si substrates |
| Sub Title (in English) | |
| Keyword(1) | tandem solar cell |
| Keyword(2) | rf sputtering |
| Keyword(3) | Si substrate |
| Keyword(4) | CuIn_xGa_1- X>Se_2 thin film |
| 1st Author's Name | Toshiyuki Yamaguchi |
| 1st Author's Affiliation | Wakayama College of Technology() |
| 2nd Author's Name | Masayoshi Suzuki |
| 2nd Author's Affiliation | Wakayama College of Technology |
| 3rd Author's Name | Yukio Yamamoto |
| 3rd Author's Affiliation | Fukui College of Technology |
| 4th Author's Name | Yasutaka Demizu |
| 4th Author's Affiliation | Toyohashi University of Technology |
| 5th Author's Name | Akira Yoshida |
| 5th Author's Affiliation | Toyohashi University of Technology |
| Date | 1994/5/19 |
| Paper # | ED94-11,CPM94-12 |
| Volume (vol) | vol.94 |
| Number (no) | 46 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |