| Presentation | 1994/5/19 Characterization of wavelength dispersion of refractive indices of column-III nitrides using spectroscopic ellipsometry Masahiko Inamori, Tetsuya Kondo, Hiroshi Amano, Isamu Akasaki, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Column-III nitride semiconductors are promising materials for appiication to short wavelength light emitters and detectors because they have large direct band gap from 1.9eV for InN to 6. 2eV for AIN at room temperature.For the fabrication of such devices,optical properties of column-III nitrides should be clarified.in this study,we investigated the wavelength dispersion of refractive indices of E ⊥ c component of GaN,AlGaN and InGaN us ing spectroscopic ellipsometry.It is found that(1)refractive indices of all samples tend to become maximam at MO specific point, and(2)maximum point shifts toward higher energy side with increase of band gap energy. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Laser Diode / GaN / AlGaN / InGaN / Spectroscopic Ellipsometry / Refractive Index |
| Paper # | ED94-10,CPM94-11 |
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| Conference Information | |
| Committee | ED |
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| Conference Date | 1994/5/19(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
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| Vice Chair | |
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| Paper Information | |
| Registration To | Electron Devices (ED) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Characterization of wavelength dispersion of refractive indices of column-III nitrides using spectroscopic ellipsometry |
| Sub Title (in English) | |
| Keyword(1) | Laser Diode |
| Keyword(2) | GaN |
| Keyword(3) | AlGaN |
| Keyword(4) | InGaN |
| Keyword(5) | Spectroscopic Ellipsometry |
| Keyword(6) | Refractive Index |
| 1st Author's Name | Masahiko Inamori |
| 1st Author's Affiliation | Department of Electrical and Electronic Engineering,Faculty of Science and Technology,Meijo University() |
| 2nd Author's Name | Tetsuya Kondo |
| 2nd Author's Affiliation | Department of Electrical and Electronic Engineering,Faculty of Science and Technology,Meijo University |
| 3rd Author's Name | Hiroshi Amano |
| 3rd Author's Affiliation | Department of Electrical and Electronic Engineering,Faculty of Science and Technology,Meijo University |
| 4th Author's Name | Isamu Akasaki |
| 4th Author's Affiliation | Department of Electrical and Electronic Engineering,Faculty of Science and Technology,Meijo University |
| Date | 1994/5/19 |
| Paper # | ED94-10,CPM94-11 |
| Volume (vol) | vol.94 |
| Number (no) | 46 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |