| Presentation | 1994/5/19 Growth of GaN using metallic-Ga and NH_3. Hiromitsu Sakai, Naonori Kondo, Hiroshi Amano, Isamu Akasaki, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Column-III nitride semiconductors are promising for the application to light emitters in the short wavelength region.It is well known that low-temperature deposited buffer layer is effective for the growth of high quality Column-III nitrides on the sapphire substrate.In-site monitoring of the growth process in atomic scale using electron beam diffraction is adequate to clarify the mechanism of buffer layer.In this study,preteatment condition for the molecular beam epitaxy growth of GaN on sapphire was investigated.It is found that the combination of initial nitridation of the surface of the sapphire and low temprature buffer layer is effective for the growth of high quality GaN on sapphire. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | GaN(Gallium Nitride) / MBF(molecular beam epifaxy) / nitridation / buffer layer |
| Paper # | ED94-9,CPM94-10 |
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| Conference Information | |
| Committee | ED |
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| Conference Date | 1994/5/19(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Electron Devices (ED) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Growth of GaN using metallic-Ga and NH_3. |
| Sub Title (in English) | |
| Keyword(1) | GaN(Gallium Nitride) |
| Keyword(2) | MBF(molecular beam epifaxy) |
| Keyword(3) | nitridation |
| Keyword(4) | buffer layer |
| 1st Author's Name | Hiromitsu Sakai |
| 1st Author's Affiliation | Department of Electrical and Electronic Engneering,Faculty of Science and Technology,Meijo University() |
| 2nd Author's Name | Naonori Kondo |
| 2nd Author's Affiliation | Department of Electrical and Electronic Engneering,Faculty of Science and Technology,Meijo University |
| 3rd Author's Name | Hiroshi Amano |
| 3rd Author's Affiliation | Department of Electrical and Electronic Engneering,Faculty of Science and Technology,Meijo University |
| 4th Author's Name | Isamu Akasaki |
| 4th Author's Affiliation | Department of Electrical and Electronic Engneering,Faculty of Science and Technology,Meijo University |
| Date | 1994/5/19 |
| Paper # | ED94-9,CPM94-10 |
| Volume (vol) | vol.94 |
| Number (no) | 46 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |