| Presentation | 1994/10/11 Nanostructure Aignment for hot electron intereferance/diffraction devices Hiroo Hongo, Jun Suzuki, Michihiko Suhara, Yasuyuki Miyamoto, Kazuhito Furuya, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We have refined and inproved the fabricabon techniques for proposed structure of observation of hot electron interference.As the fabrication technique,alignment of 70 nm pitch buried GaInAs, inp structure and 70nm pitch fine electrodes is reported for the first time.The alignment accuracy between the nanostructures was 40 nm.Formation of the detection electrodes of 40 nm pitch is reported.Using 2-step wet chemical etching 40 nm pitch InP double s structures were formed. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | electron wave devices / hot electron interefrence / nonostructure alignment / electron beam lithography / GaInAs/nP buried hetemostructure / fine electrodes |
| Paper # | ED94-76 |
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| Conference Information | |
| Committee | ED |
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| Conference Date | 1994/10/11(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Electron Devices (ED) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Nanostructure Aignment for hot electron intereferance/diffraction devices |
| Sub Title (in English) | |
| Keyword(1) | electron wave devices |
| Keyword(2) | hot electron interefrence |
| Keyword(3) | nonostructure alignment |
| Keyword(4) | electron beam lithography |
| Keyword(5) | GaInAs/nP buried hetemostructure |
| Keyword(6) | fine electrodes |
| 1st Author's Name | Hiroo Hongo |
| 1st Author's Affiliation | Department of Electrical and Electronics Engineering,Faculty of Engineering,Tokyo Institute of Technology() |
| 2nd Author's Name | Jun Suzuki |
| 2nd Author's Affiliation | Department of Electrical and Electronics Engineering,Faculty of Engineering,Tokyo Institute of Technology |
| 3rd Author's Name | Michihiko Suhara |
| 3rd Author's Affiliation | Department of Electrical and Electronics Engineering,Faculty of Engineering,Tokyo Institute of Technology |
| 4th Author's Name | Yasuyuki Miyamoto |
| 4th Author's Affiliation | Department of Electrical and Electronics Engineering,Faculty of Engineering,Tokyo Institute of Technology |
| 5th Author's Name | Kazuhito Furuya |
| 5th Author's Affiliation | Department of Electrical and Electronics Engineering,Faculty of Engineering,Tokyo Institute of Technology |
| Date | 1994/10/11 |
| Paper # | ED94-76 |
| Volume (vol) | vol.94 |
| Number (no) | 268 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |