| Presentation | 1994/10/11 Effect of AlAs surface reconstruction on properties of Ge on AlAs Takeshi Maeda, Hitoshi Tanaka, Masahiko Takikawa, Kazumi Kasai, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Ge, GaAs hetero-epitaxial systems have the advantage of combining high hole and high electron mobility devices.However, autodoping is still a problem.In an effort to solve this issue we investigated the dependence of the properties of Ge layer on AlAs surface reconstruction in molecular beam epitaxial growth of Ge on AlAs(100).Hole mobility depended drastically on surface reconstruction,and it was greatly improved on (5×4)-reconstructed AlAs.Hole mobility as high as 564cm^2/V・s with a sheet hole concentration of 1.1×10^13>cm^-2> was obtained for 380 nm thick Ge.Moreover,the mobility of the surface region reached 1088cm^2/V・ s.The (5×4)-reconstructed AlAs surface is considered to have a rou ghly even coverage of Al and As.We believe that charge neutrality at the interface suppresses surface segregation and/or diffusion. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Germanium (Ge) / Gallium Arsenide (GaAs) / molecular beam epitaxy (MBE) / surface reconstruction / segregation / diffusion |
| Paper # | ED94-69 |
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| Conference Information | |
| Committee | ED |
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| Conference Date | 1994/10/11(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
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| Vice Chair | |
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| Paper Information | |
| Registration To | Electron Devices (ED) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Effect of AlAs surface reconstruction on properties of Ge on AlAs |
| Sub Title (in English) | |
| Keyword(1) | Germanium (Ge) |
| Keyword(2) | Gallium Arsenide (GaAs) |
| Keyword(3) | molecular beam epitaxy (MBE) |
| Keyword(4) | surface reconstruction |
| Keyword(5) | segregation |
| Keyword(6) | diffusion |
| 1st Author's Name | Takeshi Maeda |
| 1st Author's Affiliation | Fujitsu Laboratories() |
| 2nd Author's Name | Hitoshi Tanaka |
| 2nd Author's Affiliation | Fujitsu Laboratories |
| 3rd Author's Name | Masahiko Takikawa |
| 3rd Author's Affiliation | Fujitsu Laboratories |
| 4th Author's Name | Kazumi Kasai |
| 4th Author's Affiliation | Fujitsu Laboratories |
| Date | 1994/10/11 |
| Paper # | ED94-69 |
| Volume (vol) | vol.94 |
| Number (no) | 268 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |