| Presentation | 1994/9/14 Prediction of high-speed bipolar transistor properties by process and device Simulaton Kishiko Maruyama, Yoichi Tamaki, Hisako Sato, Hiroo Masuda, Hitoshi Matsuo, Sigeo Ihara, Toru Toyabe, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | An efficient design methodology for high-speed bipolar transistors has been developed using process and device simulation, taking into account defect induced transient enhanced and a more accurate polysilicon emitter model.The enhancement factor of transient diffusion was extracted from measurements for preceise prediction of the impurity profile,and a new model for interfacial oxide was developed for the polysilicon emitter.As a result, prediction errors of current gain h_FE> and cut-off frequency f_T were reduced to less than 10%. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | process simulation / device simulation / bipolar transistor / transient enhanced diffusion / polysilicon emitter / interfacial oxide |
| Paper # | ED94-57,SDM94-94,VLD94-54 |
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| Conference Information | |
| Committee | ED |
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| Conference Date | 1994/9/14(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Electron Devices (ED) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Prediction of high-speed bipolar transistor properties by process and device Simulaton |
| Sub Title (in English) | |
| Keyword(1) | process simulation |
| Keyword(2) | device simulation |
| Keyword(3) | bipolar transistor |
| Keyword(4) | transient enhanced diffusion |
| Keyword(5) | polysilicon emitter |
| Keyword(6) | interfacial oxide |
| 1st Author's Name | Kishiko Maruyama |
| 1st Author's Affiliation | Central Research Laboratory,Hitachi,Ltd.() |
| 2nd Author's Name | Yoichi Tamaki |
| 2nd Author's Affiliation | Device Development Center,Hitachi,Ltd. |
| 3rd Author's Name | Hisako Sato |
| 3rd Author's Affiliation | Device Development Center,Hitachi,Ltd. |
| 4th Author's Name | Hiroo Masuda |
| 4th Author's Affiliation | Device Development Center,Hitachi,Ltd. |
| 5th Author's Name | Hitoshi Matsuo |
| 5th Author's Affiliation | Central Research Laboratory,Hitachi,Ltd. |
| 6th Author's Name | Sigeo Ihara |
| 6th Author's Affiliation | Central Research Laboratory,Hitachi,Ltd. |
| 7th Author's Name | Toru Toyabe |
| 7th Author's Affiliation | Department of Information and Computer Sciences,Faculty of Engineering,Toyo University |
| Date | 1994/9/14 |
| Paper # | ED94-57,SDM94-94,VLD94-54 |
| Volume (vol) | vol.94 |
| Number (no) | 231 |
| Page | pp.pp.- |
| #Pages | 8 |
| Date of Issue | |