| Presentation | 1994/9/13 A Very Fast Three-Dimensional Impurity Profile Simulation Im corporating an Accumulated Diffusion Length Shiroo Kamohara, Masahiro Sugaya, Hitoshi Matsuo, Shigeo Ihara, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | A very fast three-dimensional(3D)impurity profile simulator, SPIRIT-III, ADL,has been developed.To reduce the calculation time of the 3D impurity profile,an analytical equation of the 3D impurity diffusion was derived by inumucing a new physical parameter,Accumulatrd Diffusion Length(ADL).Owing to this equation, a 3D impurity profile is calculated from 1D-impurity profiles and a 3D-distribution of ADL.The CPU time of SPIRIT-III/ADL for a rectangular-type cell with 85,800 mesh points was only 252 seconds on a mainframe computer.This result shows that SPIRIT-III/ADL can be used within practical CPU times. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Simulator / Three-Dimensional Impurity Profile / Accumulated Diffusion Length |
| Paper # | ED94-51,SDM94-88,VLD94-48 |
| Date of Issue |
| Conference Information | |
| Committee | ED |
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| Conference Date | 1994/9/13(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Electron Devices (ED) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | A Very Fast Three-Dimensional Impurity Profile Simulation Im corporating an Accumulated Diffusion Length |
| Sub Title (in English) | |
| Keyword(1) | Simulator |
| Keyword(2) | Three-Dimensional Impurity Profile |
| Keyword(3) | Accumulated Diffusion Length |
| 1st Author's Name | Shiroo Kamohara |
| 1st Author's Affiliation | Central Research Laboratory,Hitachi() |
| 2nd Author's Name | Masahiro Sugaya |
| 2nd Author's Affiliation | Central Research Laboratory,Hitachi |
| 3rd Author's Name | Hitoshi Matsuo |
| 3rd Author's Affiliation | Central Research Laboratory,Hitachi |
| 4th Author's Name | Shigeo Ihara |
| 4th Author's Affiliation | Central Research Laboratory,Hitachi |
| Date | 1994/9/13 |
| Paper # | ED94-51,SDM94-88,VLD94-48 |
| Volume (vol) | vol.94 |
| Number (no) | 230 |
| Page | pp.pp.- |
| #Pages | 8 |
| Date of Issue | |