| Presentation | 1999/2/15 A Study on SrBi_2Ta_2O_9 Thin Films Prepared by Sol-Gel Method using Steam-curing Process Yoshihiro Sawada, Hideya Kobari, Yoshimi Sato, Akira Hashimoto, Ichiro Koiwa, Hiroyo Kato, Tetsuya Osaka, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | In recent years, SrBi_2Ta_2O_9 (SBT) thin films have been receiving attention as fatigue-free ferroelectric materials and research is quite active in this area. We have been developing our original hydrolyzed sol-gel coating solutions the molecular structures of which we can control by applying hydrolysis. We studied the SBT thin film forming process using these coating solutions with the steam curing process used together and observed lowering temperature of crystallization the improvement of crystal orientation. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | SrBi_2Ta_2O_9 (SBT) / hydrolysis / sol-gel method / metalloxane bond / Steam cure |
| Paper # | ED98-240 |
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| Conference Information | |
| Committee | ED |
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| Conference Date | 1999/2/15(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Vice Chair | |
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| Paper Information | |
| Registration To | Electron Devices (ED) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | A Study on SrBi_2Ta_2O_9 Thin Films Prepared by Sol-Gel Method using Steam-curing Process |
| Sub Title (in English) | |
| Keyword(1) | SrBi_2Ta_2O_9 (SBT) |
| Keyword(2) | hydrolysis |
| Keyword(3) | sol-gel method |
| Keyword(4) | metalloxane bond |
| Keyword(5) | Steam cure |
| 1st Author's Name | Yoshihiro Sawada |
| 1st Author's Affiliation | Specialty Development Division 1, Research & Development Department, Tokyo Ohka Kogyo Co., Ltd.() |
| 2nd Author's Name | Hideya Kobari |
| 2nd Author's Affiliation | Specialty Development Division 1, Research & Development Department, Tokyo Ohka Kogyo Co., Ltd. |
| 3rd Author's Name | Yoshimi Sato |
| 3rd Author's Affiliation | Specialty Development Division 1, Research & Development Department, Tokyo Ohka Kogyo Co., Ltd. |
| 4th Author's Name | Akira Hashimoto |
| 4th Author's Affiliation | Specialty Development Division 1, Research & Development Department, Tokyo Ohka Kogyo Co., Ltd. |
| 5th Author's Name | Ichiro Koiwa |
| 5th Author's Affiliation | Semiconductor Technology Laboratory, Research & Development Group, Oki Electric Industry Co., Ltd. |
| 6th Author's Name | Hiroyo Kato |
| 6th Author's Affiliation | Semiconductor Technology Laboratory, Research & Development Group, Oki Electric Industry Co., Ltd. |
| 7th Author's Name | Tetsuya Osaka |
| 7th Author's Affiliation | School of Science and Engineering, Waseda University |
| Date | 1999/2/15 |
| Paper # | ED98-240 |
| Volume (vol) | vol.98 |
| Number (no) | 590 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |