| Presentation | 1998/11/6 Quantum Chemical Calculations of Gas Phase Reaction of Al(CH_3)_3 and NH_3 in Atmospheric Pressure MOVPE Koh Matsumoto, Nakao Akutsu, Hiroki Tokunaga, Akitomo Tachibana, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Gas phase reaction between TMA and NH_3 blocks the incorporation of Ga into the film as well as Al in atmospheric pressure MOVPE. In order to elucidate this mechanism, we have investigated the reaction between TMA and NH_3 in terms of the quantum chemical calculations. According to the calculations, the barrier of methyl elimination in the TAM-NH_3 system is low as compared with other systems, and therefore it is easy to form the intermediate leading to the propagation of polymer in the TMA-NH_3-TMG system. In this report, we introduce the proposed reaction process based on the experimental results for model of the TMA-NH_3 system. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | APMOVPE / III-Nitride semiconductors / parasitic reaction / AlGaN / TMA / quantum chemical calculations |
| Paper # | ED98-140,CPM98-143 |
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| Conference Information | |
| Committee | ED |
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| Conference Date | 1998/11/6(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
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| Paper Information | |
| Registration To | Electron Devices (ED) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Quantum Chemical Calculations of Gas Phase Reaction of Al(CH_3)_3 and NH_3 in Atmospheric Pressure MOVPE |
| Sub Title (in English) | |
| Keyword(1) | APMOVPE |
| Keyword(2) | III-Nitride semiconductors |
| Keyword(3) | parasitic reaction |
| Keyword(4) | AlGaN |
| Keyword(5) | TMA |
| Keyword(6) | quantum chemical calculations |
| 1st Author's Name | Koh Matsumoto |
| 1st Author's Affiliation | NIPPON SANSO Corp.Tsukuba Lab.() |
| 2nd Author's Name | Nakao Akutsu |
| 2nd Author's Affiliation | NIPPON SANSO Corp.Tsukuba Lab. |
| 3rd Author's Name | Hiroki Tokunaga |
| 3rd Author's Affiliation | NIPPON SANSO Corp.Tsukuba Lab. |
| 4th Author's Name | Akitomo Tachibana |
| 4th Author's Affiliation | Dept.Eng.Physics and Mechanics, Kyoto University |
| Date | 1998/11/6 |
| Paper # | ED98-140,CPM98-143 |
| Volume (vol) | vol.98 |
| Number (no) | 384 |
| Page | pp.pp.- |
| #Pages | 7 |
| Date of Issue | |