| Presentation | 1998/7/21 Surface cleaning of garium arsenide and formation of silicon nitride using by catalytic-CVD method Akira Izumi, Atsushi Masuda, Hideki Matsumura, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We proposed a novel method of low temperature surface cleaning technology of GaAs and formation of high quality silicon nitride(SiN_x) films by catalytic chemical vapor deposition(Cat-CVD) method. An NH_3 gas was used for the surface cleaning of(100)GaAs without any chemical treatment at the substrate temperature as low as 150℃. XPS measurements revealed obvious reduction of intensities of oxygen related peaks of GaAs and appearance of nitrogen related peaks from long time treated samples. Using a SiH_4 and NH_3 gas mixture, stoichiometric, conformal step coverage and low hydrogen content SiN_x films were obtained below 300℃ by this method. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | catalytic-CVD / hot wire CVD / surface cleaning / surface nitridation / GaAs / SiN_x |
| Paper # | ED98-82 |
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| Conference Information | |
| Committee | ED |
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| Conference Date | 1998/7/21(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Electron Devices (ED) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Surface cleaning of garium arsenide and formation of silicon nitride using by catalytic-CVD method |
| Sub Title (in English) | |
| Keyword(1) | catalytic-CVD |
| Keyword(2) | hot wire CVD |
| Keyword(3) | surface cleaning |
| Keyword(4) | surface nitridation |
| Keyword(5) | GaAs |
| Keyword(6) | SiN_x |
| 1st Author's Name | Akira Izumi |
| 1st Author's Affiliation | JAIST(Japan Advanced Institute of Science and Technology)() |
| 2nd Author's Name | Atsushi Masuda |
| 2nd Author's Affiliation | JAIST(Japan Advanced Institute of Science and Technology) |
| 3rd Author's Name | Hideki Matsumura |
| 3rd Author's Affiliation | JAIST(Japan Advanced Institute of Science and Technology) |
| Date | 1998/7/21 |
| Paper # | ED98-82 |
| Volume (vol) | vol.98 |
| Number (no) | 184 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |