| Presentation | 1998/7/21 GaAs surface passivation with GaS thin film and its application Naoya Okamoto, Naoki Hara, Tsuyoshi Takahashi, Hitoshi Tanaka, Masahiko Takikawa, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We report on GaAs surface passivation with GaS film grown by molecular beam epitaxy using tertiarybutyl-galliumsulfide-cubane[(t-Bu)GaS]_4. By passivating with GaS, GaAs photoluminescence intensity increasedand has remainedsteady for 2 years. GaS is along-term stable passivation material. The interface state density dependson the GaAs surfacereconstruction before GaS passiviation and it shows the lowest value of 5x10^<10> eV^<-1>cm^<-2> for As terminated c(4x4) reconstruction among the investigated reconstructions. Furthemore, we applied GaS passivation to depletion-mode GaS/GaAs MISFET and nonalloyed ohmic contact to n-GaAs. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | surface passivation / GaS / interface state density / surface reconstruction / MISFET / nonalloyed ohmic |
| Paper # | ED98-80 |
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| Conference Information | |
| Committee | ED |
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| Conference Date | 1998/7/21(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
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| Assistant | |
| Paper Information | |
| Registration To | Electron Devices (ED) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | GaAs surface passivation with GaS thin film and its application |
| Sub Title (in English) | |
| Keyword(1) | surface passivation |
| Keyword(2) | GaS |
| Keyword(3) | interface state density |
| Keyword(4) | surface reconstruction |
| Keyword(5) | MISFET |
| Keyword(6) | nonalloyed ohmic |
| 1st Author's Name | Naoya Okamoto |
| 1st Author's Affiliation | Fujitsu Laboratories Ltd.() |
| 2nd Author's Name | Naoki Hara |
| 2nd Author's Affiliation | Fujitsu Laboratories Ltd. |
| 3rd Author's Name | Tsuyoshi Takahashi |
| 3rd Author's Affiliation | Fujitsu Laboratories Ltd. |
| 4th Author's Name | Hitoshi Tanaka |
| 4th Author's Affiliation | Fujitsu Laboratories Ltd. |
| 5th Author's Name | Masahiko Takikawa |
| 5th Author's Affiliation | Fujitsu Laboratories Ltd. |
| Date | 1998/7/21 |
| Paper # | ED98-80 |
| Volume (vol) | vol.98 |
| Number (no) | 184 |
| Page | pp.pp.- |
| #Pages | 7 |
| Date of Issue | |