| Presentation | 1998/7/21 SEM/AFM Based Nanofabrication of Carbonaceous Masks for Selective Growth on Semiconductor Surfaces Adrian Avramescu, Akio Ueta, Katsuhiro Uesugi, Ikuo Suemune, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | A nanometer-scale mask that can be used for selective growth or selective etching was obtained by two-stage patterning. In the first step, a microscopic patterning was performed using a scanning electron microscope(SEM). In the second stage patterning of the carbonaceous film was made using an atomic force microscope(AFM). Further etching resulted in the pattern formation on the semiconductor surface with a minimum linewidth of ～22nm. Selective growth of ZnSe and ZnS as low as 300～400℃ is possible with thus prepared carbonaceous masks. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | AFM / SEM / nanolithography / selective growth / carbonaceous film / ZnSe |
| Paper # | ED98-77 |
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| Conference Information | |
| Committee | ED |
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| Conference Date | 1998/7/21(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
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| Vice Chair | |
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| Assistant | |
| Paper Information | |
| Registration To | Electron Devices (ED) |
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| Language | ENG |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | SEM/AFM Based Nanofabrication of Carbonaceous Masks for Selective Growth on Semiconductor Surfaces |
| Sub Title (in English) | |
| Keyword(1) | AFM |
| Keyword(2) | SEM |
| Keyword(3) | nanolithography |
| Keyword(4) | selective growth |
| Keyword(5) | carbonaceous film |
| Keyword(6) | ZnSe |
| 1st Author's Name | Adrian Avramescu |
| 1st Author's Affiliation | Research Institute for Electronic Science, Hokkaido University() |
| 2nd Author's Name | Akio Ueta |
| 2nd Author's Affiliation | Research Institute for Electronic Science, Hokkaido University |
| 3rd Author's Name | Katsuhiro Uesugi |
| 3rd Author's Affiliation | Research Institute for Electronic Science, Hokkaido University |
| 4th Author's Name | Ikuo Suemune |
| 4th Author's Affiliation | Research Institute for Electronic Science, Hokkaido University |
| Date | 1998/7/21 |
| Paper # | ED98-77 |
| Volume (vol) | vol.98 |
| Number (no) | 184 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |