Presentation 1998/7/21
Room Temperature Single Electron Transistor formed by AFM Nano-Oxidation Process
Kazuhiko Matsumoto,
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Abstract(in English) Room temperature characteristics of the single electron transistor fabricated using the AFM nano-oxidation process are described. New and improved AFM non-oxidation process are also included which enhances the aspect ration of the oxidized titanium line. A clear Coulomb oscilation with teh period of 1.8V and a Coulomb diamond are observed at room temperature.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) AFM / STM / single electron transistor / Coulomb oscillation / Coulomb diamond
Paper # ED98-76
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Committee ED
Conference Date 1998/7/21(1days)
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Registration To Electron Devices (ED)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Room Temperature Single Electron Transistor formed by AFM Nano-Oxidation Process
Sub Title (in English)
Keyword(1) AFM
Keyword(2) STM
Keyword(3) single electron transistor
Keyword(4) Coulomb oscillation
Keyword(5) Coulomb diamond
1st Author's Name Kazuhiko Matsumoto
1st Author's Affiliation Electrotechnical Laboratory()
Date 1998/7/21
Paper # ED98-76
Volume (vol) vol.98
Number (no) 184
Page pp.pp.-
#Pages 7
Date of Issue