| Presentation | 1998/5/22 Study of surface photo-chemical reactions induced by VUV-light Takanori Hayakawa, Osamu Hosokawa, Akitaka Yoshigoe, Akihiro Wakahara, Akira Yoshida, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Recently, vacuum ultraviolet(VUV)-light sources are opening up a new prospect in a semiconductor processing technology because of a high photon energy. The effect on the semiconductor surface with VUV-light must be clarified. Though it is of importance to investigate the defect creation and an atomic behavior on the semiconductor surfaces. In this study, undulator radiation and ArF excimer laser were chosen as a light source. Molybdenum disulfide(MoS_2) was used as a substrate. VUV-light induced surface reaction was investigated on the MoS_2 surface using scanning tunneling microscopy(STM). By comparing the results obtained for different photon energies, it was found that VUV-light irradiation modifies the MoS_2 surface and the effect is dependent on the photon energy. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | VUV-light / STM / MoS_2 |
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| Conference Information | |
| Committee | ED |
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| Conference Date | 1998/5/22(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Electron Devices (ED) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Study of surface photo-chemical reactions induced by VUV-light |
| Sub Title (in English) | |
| Keyword(1) | VUV-light |
| Keyword(2) | STM |
| Keyword(3) | MoS_2 |
| 1st Author's Name | Takanori Hayakawa |
| 1st Author's Affiliation | Toyohashi University of Technology() |
| 2nd Author's Name | Osamu Hosokawa |
| 2nd Author's Affiliation | Toyohashi University of Technology |
| 3rd Author's Name | Akitaka Yoshigoe |
| 3rd Author's Affiliation | Toyohashi University of Technology |
| 4th Author's Name | Akihiro Wakahara |
| 4th Author's Affiliation | Toyohashi University of Technology |
| 5th Author's Name | Akira Yoshida |
| 5th Author's Affiliation | Toyohashi University of Technology |
| Date | 1998/5/22 |
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| Volume (vol) | vol.98 |
| Number (no) | 60 |
| Page | pp.pp.- |
| #Pages | 7 |
| Date of Issue | |