| Presentation | 1998/5/22 Characteristics of Dry Etching in CdTe Layers Grown by Metalorganic Vapor Phase Epitaxy Toru Nimura, Yoshihiko Asai, Fumihito Inukai, Noriaki Araki, Mitsuyoshi Miyata, Kazuhito Yasuda, |
|---|---|
| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Characteristics of ECR dry etching in CdTe layers have been studied using CH_4, H_2, Ar, and N_2. Etching rates decrease with increase of N_2 supply. Etch rate also increases with CH_4 flow. But the rate decreases at excess supply of CH_4. Etching was also possible using H_2 and Ar. Etching mechanisms were discussed. The influences of etching on CdTe layer was also evaluated. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | ECR plasma etching / etching gases / CdTe / electrical properties |
| Paper # | |
| Date of Issue |
| Conference Information | |
| Committee | ED |
|---|---|
| Conference Date | 1998/5/22(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Electron Devices (ED) |
|---|---|
| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Characteristics of Dry Etching in CdTe Layers Grown by Metalorganic Vapor Phase Epitaxy |
| Sub Title (in English) | |
| Keyword(1) | ECR plasma etching |
| Keyword(2) | etching gases |
| Keyword(3) | CdTe |
| Keyword(4) | electrical properties |
| 1st Author's Name | Toru Nimura |
| 1st Author's Affiliation | Department of Electrical and Computer Engineering, Nagoya Institute of Technology() |
| 2nd Author's Name | Yoshihiko Asai |
| 2nd Author's Affiliation | Department of Electrical and Computer Engineering, Nagoya Institute of Technology |
| 3rd Author's Name | Fumihito Inukai |
| 3rd Author's Affiliation | Department of Electrical and Computer Engineering, Nagoya Institute of Technology |
| 4th Author's Name | Noriaki Araki |
| 4th Author's Affiliation | Department of Electrical and Computer Engineering, Nagoya Institute of Technology |
| 5th Author's Name | Mitsuyoshi Miyata |
| 5th Author's Affiliation | Department of Electrical and Computer Engineering, Nagoya Institute of Technology |
| 6th Author's Name | Kazuhito Yasuda |
| 6th Author's Affiliation | Department of Electrical and Computer Engineering, Nagoya Institute of Technology |
| Date | 1998/5/22 |
| Paper # | |
| Volume (vol) | vol.98 |
| Number (no) | 60 |
| Page | pp.pp.- |
| #Pages | 7 |
| Date of Issue | |