| Presentation | 1998/5/22 CdZnTe Epitaxial Growth and Doping Method by Remote Plasma Enhanced Metal Organic Chemical Vapor Deposition Daiji Noda, Toru Aoki, Yoichiro Nakanishi, Yoshinori Hatanaka, |
|---|---|
| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Cadmium Zinc telluride (CdZnTe) has been grown by remote plasma enhanced metal organic chemical vapor deposition (RPE-MOCVD). Epitaxial growth of CdZnTe films were observed when associated with hydrogen radicals. The p-type CdZnTe films were obtained when a mixture of H_2 and N_2, or NH_3 gas was introduced into the plasma. After annealing at 600℃ in the ambient of nitrogen for 10 minutes, the carrier concentration and resistivity of CdZnTe films are evaluated as 1.2×10^<19>cm^<-3> and 3.7×10^<-2>Ωcm, respectively. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Remote plasma enhanced MOCVD / CdZnTe / Nitrogen radical doping / p-CdZnTe |
| Paper # | |
| Date of Issue |
| Conference Information | |
| Committee | ED |
|---|---|
| Conference Date | 1998/5/22(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Electron Devices (ED) |
|---|---|
| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | CdZnTe Epitaxial Growth and Doping Method by Remote Plasma Enhanced Metal Organic Chemical Vapor Deposition |
| Sub Title (in English) | |
| Keyword(1) | Remote plasma enhanced MOCVD |
| Keyword(2) | CdZnTe |
| Keyword(3) | Nitrogen radical doping |
| Keyword(4) | p-CdZnTe |
| 1st Author's Name | Daiji Noda |
| 1st Author's Affiliation | Gradate School of Electronic Science and Technology, Shizuoka University() |
| 2nd Author's Name | Toru Aoki |
| 2nd Author's Affiliation | Gradate School of Electronic Science and Technology, Shizuoka University |
| 3rd Author's Name | Yoichiro Nakanishi |
| 3rd Author's Affiliation | Gradate School of Electronic Science and Technology, Shizuoka University:Research Institute of Electronics, Shizuika University |
| 4th Author's Name | Yoshinori Hatanaka |
| 4th Author's Affiliation | Gradate School of Electronic Science and Technology, Shizuoka University:Research Institute of Electronics, Shizuika University |
| Date | 1998/5/22 |
| Paper # | |
| Volume (vol) | vol.98 |
| Number (no) | 60 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |