| Presentation | 1994/1/20 AlGaAs/GaAs Heterojunction Bipolar Transistorw with Buried SiO_2 in the Extrinsic Collector Kazuhiro Mochizuki, Tohru Nakamura, Tomonori Tanoue, Hiroshi Masuda, Masatada Horiuchi, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | This report presents a novel heterojunction bipolar transistor(HBT)structure with buried SiO_2 in the extrinsic collector.AlGaAs, molecular beam epitaxy.Gummel plots shows that the collector current of these HBTs is almost the same as that of conventional HBTs.The base-collector capacitance C_BC> is reduced to 35% for HBTs with an emitter area of 4×4μm^2.In order to realize one-dime nsional HBTs which minimizes C_BC>,p-type polycrystalline GaAs with low resistivity has been developed by heavy doping of Be. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | heterojunction bipolar transistor / bose-collector capacitance / dielectric film |
| Paper # | ED93-158,MW93-115,ICD93-173 |
| Date of Issue |
| Conference Information | |
| Committee | ED |
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| Conference Date | 1994/1/20(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
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| Assistant | |
| Paper Information | |
| Registration To | Electron Devices (ED) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | AlGaAs/GaAs Heterojunction Bipolar Transistorw with Buried SiO_2 in the Extrinsic Collector |
| Sub Title (in English) | |
| Keyword(1) | heterojunction bipolar transistor |
| Keyword(2) | bose-collector capacitance |
| Keyword(3) | dielectric film |
| 1st Author's Name | Kazuhiro Mochizuki |
| 1st Author's Affiliation | Central Research Laboratory,Hitachi Ltd.() |
| 2nd Author's Name | Tohru Nakamura |
| 2nd Author's Affiliation | Central Research Laboratory,Hitachi Ltd. |
| 3rd Author's Name | Tomonori Tanoue |
| 3rd Author's Affiliation | Central Research Laboratory,Hitachi Ltd. |
| 4th Author's Name | Hiroshi Masuda |
| 4th Author's Affiliation | Central Research Laboratory,Hitachi Ltd. |
| 5th Author's Name | Masatada Horiuchi |
| 5th Author's Affiliation | Central Research Laboratory,Hitachi Ltd. |
| Date | 1994/1/20 |
| Paper # | ED93-158,MW93-115,ICD93-173 |
| Volume (vol) | vol.93 |
| Number (no) | 416 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |