| Presentation | 1993/11/18 Scanning tunneling microscopy study of GaAs step structures on vicinal substrate grown by metalorganic chemical vapor deposition Makoto Kasu, Naoki Kobayashi, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Using scanning tunneling microscopy(STM),we study the step structure of metalorganic chemical vapor deposition(MOCVD)- grown(001)GaAs on a vicinal substrate for the first time.The undulation amplitude of the monolayer steps grown on a surface misoriented in the£110!direction(A step)is about twice that of the se grown on a surface misoriented in the£1^^-10!direction(B step). On a substrate at misorientation angles≦7.0°,step bunching occurs and the vicinal surface decomposed into(001)terraces and facets on which steps bunch when 575℃≦growth temperature(Tg)≦650℃;and ell iptical islands appear between the monolayer steps due to a decrease of Ga diffusion coefficient at Tg=530℃. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | STM / MOCVD / Monolayer step / GaAs / Step bunching / Surface diffusion |
| Paper # | ED93-115,CPM93-86 |
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| Conference Information | |
| Committee | ED |
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| Conference Date | 1993/11/18(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Electron Devices (ED) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Scanning tunneling microscopy study of GaAs step structures on vicinal substrate grown by metalorganic chemical vapor deposition |
| Sub Title (in English) | |
| Keyword(1) | STM |
| Keyword(2) | MOCVD |
| Keyword(3) | Monolayer step |
| Keyword(4) | GaAs |
| Keyword(5) | Step bunching |
| Keyword(6) | Surface diffusion |
| 1st Author's Name | Makoto Kasu |
| 1st Author's Affiliation | NTT Basic Research Laboratories() |
| 2nd Author's Name | Naoki Kobayashi |
| 2nd Author's Affiliation | NTT Basic Research Laboratories |
| Date | 1993/11/18 |
| Paper # | ED93-115,CPM93-86 |
| Volume (vol) | vol.93 |
| Number (no) | 325 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |