Presentation 1993/5/21
Crystal growth of Bi2212 superconducting thin films by ion- assisted IBS
Katsuhiko Abe, Haodong Yan, Tamio Endo,
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Abstract(in English) BiSrCaCuO thin films were deposited by ion assisted IBS to obtain-superconducting 2212 phase.A target of BiSrCaCuO ceramic was sputtered on MgO(100) substrate at oxygen partial pressures of l-3XlO^-4> Torr at substrate temperatures of 600-700℃.During the film growth,the substrate was irradiated by the assisting ions of O^+,and its effect was examined.A scattering of film composition can be reduced by increasing the oxygen pressure.The films are amorphous without assisting,however 2201 crystal phase is grown by assisting.When the assisted films are annealed at 800℃,the 2212 cr ystal phase is grown.This film shows superconducting ρ-T character istics and T_c,ON>=91K.The growth of the 2212 phase is promoted by annealing at 820℃ and the film shows T_c,ZERO>=93K.However,whe n the non-assisted films are annealed by the same way impurity phase are only grown and they show no superconducting properties. Promotions of a surface migration and oxydation are expected as effects of the ion assisting.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) ion assisted IBS / Bi superconducting thin film / 2212 phase / 2201 phose / XRD / Tc93K
Paper # ED93-34,CPM93-25
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Committee ED
Conference Date 1993/5/21(1days)
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Registration To Electron Devices (ED)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Crystal growth of Bi2212 superconducting thin films by ion- assisted IBS
Sub Title (in English)
Keyword(1) ion assisted IBS
Keyword(2) Bi superconducting thin film
Keyword(3) 2212 phase
Keyword(4) 2201 phose
Keyword(5) XRD
Keyword(6) Tc93K
1st Author's Name Katsuhiko Abe
1st Author's Affiliation Department of Electrical and Electronic Engineering,Faculty of Engineering,Mie University()
2nd Author's Name Haodong Yan
2nd Author's Affiliation Department of Electrical and Electronic Engineering,Faculty of Engineering,Mie University
3rd Author's Name Tamio Endo
3rd Author's Affiliation Department of Electrical and Electronic Engineering,Faculty of Engineering,Mie University
Date 1993/5/21
Paper # ED93-34,CPM93-25
Volume (vol) vol.93
Number (no) 46
Page pp.pp.-
#Pages 7
Date of Issue