| Presentation | 1993/5/21 Potential of laser ablation as a molecular beam source Tetsu Kachi, Hiroyuki Kano, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Potential of laser ablation as a molecular beam source has been investigated.Eleven elemental materials have been deposited on the substrates by the laser ablation and the surface morpholgies have been observed.Main disadvantage of the laser ablation is particle deposition in the films.It has been found that the particle deposition strongly depended on the properties of the target materials.Materials which have the melting point above.～2000℃ dep osit or sublimate do not deposit the particles.Materials which have the melting point lower than ～2000℃ deposit the particles.We have found that these particle depositions were avoided by using the molten targets.Properties of the evaporation have shown that the laser ablation had the potential of the superior molecular beam source. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | laser ablation / molecular beam source / molecular beam epitaxy / excimer laser / molten target |
| Paper # | ED93-28,CPM93-19 |
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| Conference Information | |
| Committee | ED |
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| Conference Date | 1993/5/21(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
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| Paper Information | |
| Registration To | Electron Devices (ED) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Potential of laser ablation as a molecular beam source |
| Sub Title (in English) | |
| Keyword(1) | laser ablation |
| Keyword(2) | molecular beam source |
| Keyword(3) | molecular beam epitaxy |
| Keyword(4) | excimer laser |
| Keyword(5) | molten target |
| 1st Author's Name | Tetsu Kachi |
| 1st Author's Affiliation | Toyota Central Research and Development Labs.,Inc.() |
| 2nd Author's Name | Hiroyuki Kano |
| 2nd Author's Affiliation | Toyota Central Research and Development Labs.,Inc. |
| Date | 1993/5/21 |
| Paper # | ED93-28,CPM93-19 |
| Volume (vol) | vol.93 |
| Number (no) | 46 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |