| Presentation | 1993/5/21 Characterization of CZ-Si single-crystals based on Photoluminescence using Fourier transform Raman Spectrometer Mototsugu Hamada, Takashi Katoda, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Fourier transform Raman spectrometer(FT-Raman)was used for measurement of photoluminescence from silicon single-crystals grown by Czochralski method(CZ-Si).Thermal donors and oxygen precipitates were formed in CZ-Si by annealing around 500℃ and at a temperature higher than 800℃.Luminescence whose peak was around 0.7eV was observed after either of these defects was formed. Using FT-Raman,it was possible to observe luminescence from thermal donors or oxygen precipitates formed by very short annealing.By the method,it was shown that thermal donors were formed only in the center region of crystals which had been grown at a relatively low rate.A new model was proposed that distribution of oxygen clusters and self-interstitial slicon decide the ring distribution of oxidation-induced stacking faults. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Fourier transform Raman spectrometer / infra-red spectroscopy / photoluminescence / thermal donor / oxygen precipitate / stacking fault ring |
| Paper # | ED93-27,CPM93-18 |
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| Conference Information | |
| Committee | ED |
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| Conference Date | 1993/5/21(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Electron Devices (ED) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Characterization of CZ-Si single-crystals based on Photoluminescence using Fourier transform Raman Spectrometer |
| Sub Title (in English) | |
| Keyword(1) | Fourier transform Raman spectrometer |
| Keyword(2) | infra-red spectroscopy |
| Keyword(3) | photoluminescence |
| Keyword(4) | thermal donor |
| Keyword(5) | oxygen precipitate |
| Keyword(6) | stacking fault ring |
| 1st Author's Name | Mototsugu Hamada |
| 1st Author's Affiliation | Department of Electronic Engineering,Faculty of Engineering,The University of Tokyo() |
| 2nd Author's Name | Takashi Katoda |
| 2nd Author's Affiliation | Department of Electronic Engineering,Faculty of Engineering,The University of Tokyo |
| Date | 1993/5/21 |
| Paper # | ED93-27,CPM93-18 |
| Volume (vol) | vol.93 |
| Number (no) | 46 |
| Page | pp.pp.- |
| #Pages | 8 |
| Date of Issue | |