Presentation 1993/5/21
Fabrication of AlGaAs/GaAs surface emitting laser on Si substrate
Tsunemasa Deguchi, Yoshiaki Hasegawa, Takashi Egawa, Takashi Jinbo, Masayoshi Umeno,
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Abstract(in English) We have fabricated an AlGaAs, GaAs separate confinement heterostructure single,-quantum-well surface emitting laser on Si substrate by MOCVD.AlAs/GaAs semiconductor multi-layers of distributed Bragg reflector structure and nonalloyed Au-Zn/Au metal reflector were used as the reflection mirrors for inner substrate(Si substrate side)and surface substrate light output side),respectively.The laser has exhibited the pulsed Ihreshold current as low as 79 mA(the Ihreshold current density as low as 4. 9 kA/cm^2)at room temperature under the pulsed condition(the cycle: 1μsec.,the width:O.1μsec.).The peak spectrum was 841 nm.Major imp rovements in the active layer structure and the reflecting mirror are still necessary for room- temperature CW operation.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) MOCVD / GaAs/i substrate / Surface emitting laser / AlAs/aAs DBR / room temperature pulsed exciation
Paper # ED93-23,CPM93-14
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Committee ED
Conference Date 1993/5/21(1days)
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Registration To Electron Devices (ED)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Fabrication of AlGaAs/GaAs surface emitting laser on Si substrate
Sub Title (in English)
Keyword(1) MOCVD
Keyword(2) GaAs/i substrate
Keyword(3) Surface emitting laser
Keyword(4) AlAs/aAs DBR
Keyword(5) room temperature pulsed exciation
1st Author's Name Tsunemasa Deguchi
1st Author's Affiliation Nagoya institute of technology()
2nd Author's Name Yoshiaki Hasegawa
2nd Author's Affiliation Nagoya institute of technology
3rd Author's Name Takashi Egawa
3rd Author's Affiliation Nagoya institute of technology
4th Author's Name Takashi Jinbo
4th Author's Affiliation Nagoya institute of technology
5th Author's Name Masayoshi Umeno
5th Author's Affiliation Nagoya institute of technology
Date 1993/5/21
Paper # ED93-23,CPM93-14
Volume (vol) vol.93
Number (no) 46
Page pp.pp.-
#Pages 6
Date of Issue