| Presentation | 1993/5/20 Process Technology for Combination of Sensor and IC Susumu Sugiyama, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | The process technology which can be used for combining sensors and ICs on a single chip,applying mechanical and thermal properies of microstructures,made by using micromachining,is described below. For compatibility of sensor process with IC process,features of micromachining,problems of Si anisotropic etching,anisotropic etching using TMAH(tetramethyl ammonium hydroxide),poly-Si sacrificial layer etching,properties of Si nitride thin film are investigated.As the application,a pressure sensor array with combined pressre sensors and processing circuits,and an infrared sensor with combined thermo-elements formed on thermal isolated membranes and detected circuts are presented. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | sensor / integrated circuit(IC) / IC process / pressure sensor / infrared sensor / anisotropic etching |
| Paper # | ED93-21,CPM93-12 |
| Date of Issue |
| Conference Information | |
| Committee | ED |
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| Conference Date | 1993/5/20(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Electron Devices (ED) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Process Technology for Combination of Sensor and IC |
| Sub Title (in English) | |
| Keyword(1) | sensor |
| Keyword(2) | integrated circuit(IC) |
| Keyword(3) | IC process |
| Keyword(4) | pressure sensor |
| Keyword(5) | infrared sensor |
| Keyword(6) | anisotropic etching |
| 1st Author's Name | Susumu Sugiyama |
| 1st Author's Affiliation | Toyota Central Reseach and Development Laboratories() |
| Date | 1993/5/20 |
| Paper # | ED93-21,CPM93-12 |
| Volume (vol) | vol.93 |
| Number (no) | 45 |
| Page | pp.pp.- |
| #Pages | 8 |
| Date of Issue | |