| Presentation | 1993/5/20 A Combustion Pressure Sensor using Silicon Force Transducer : Application of Piezoresistive Effect for the Sensor Yoshiteru Omura, Kouji Tsukada, Takeshi Morikawa, Yutaka Nonomura, Hitoshi Goto, Akira Hosono, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | The development of a combustion pressure sensor(CPS)has been demanded for a new engine control system.We have developed the CPS installed in an engine cylinder in order to controlling the advanced lean combustion engine.The CPS consists of a metal diaphragm,a force transducer,and an amplifier.The force transducer utilizes the piezoresistive effect of a silicon single crystal and it converts the applied force into voltage outputs. The force transducer has a simple structure.It is composed of the silicon single crystal chip,a force transmission block,and a base block.The blocks are made of devitrified glass.Input electrodes and output electrodes are formed on the surface of the silicon chip and the blocks are bonded on the both surfaces of the chip using the anodic bonding technique. The CPS was on-boarded in the product automobiles in 1992. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Silicon / Force / Transducer / Combustion / Pressure Sensor / Anodic Bonding |
| Paper # | ED93-20,CPM93-11 |
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| Conference Information | |
| Committee | ED |
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| Conference Date | 1993/5/20(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Electron Devices (ED) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | A Combustion Pressure Sensor using Silicon Force Transducer : Application of Piezoresistive Effect for the Sensor |
| Sub Title (in English) | |
| Keyword(1) | Silicon |
| Keyword(2) | Force |
| Keyword(3) | Transducer |
| Keyword(4) | Combustion |
| Keyword(5) | Pressure Sensor |
| Keyword(6) | Anodic Bonding |
| 1st Author's Name | Yoshiteru Omura |
| 1st Author's Affiliation | Toyota Central Research & Development Laboratories,Inc.() |
| 2nd Author's Name | Kouji Tsukada |
| 2nd Author's Affiliation | Toyota Central Research & Development Laboratories,Inc. |
| 3rd Author's Name | Takeshi Morikawa |
| 3rd Author's Affiliation | Toyota Central Research & Development Laboratories,Inc. |
| 4th Author's Name | Yutaka Nonomura |
| 4th Author's Affiliation | Toyota Central Research & Development Laboratories,Inc. |
| 5th Author's Name | Hitoshi Goto |
| 5th Author's Affiliation | Toyota Motor Corporation |
| 6th Author's Name | Akira Hosono |
| 6th Author's Affiliation | Toyota Central Research & Development Laboratories,Inc. |
| Date | 1993/5/20 |
| Paper # | ED93-20,CPM93-11 |
| Volume (vol) | vol.93 |
| Number (no) | 45 |
| Page | pp.pp.- |
| #Pages | 7 |
| Date of Issue | |