| Presentation | 1993/5/20 Characterization of GaAs Surfaces grown by MOCVD,MBE and CBE using Atomic Force Microscopy Naohisa Inoue, Jiro Osaka, Kenji Ikuta, Haruki Yokoyama, Hideo Sugiura, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | A new technique preparing GaAsP layers with a desired composition on GaP substrates has been developed. A GaAs layer grown on a GaP substrate by step cooling was brought into contact with Ga-As-P saturated solution,and kept at 795℃.This annealing process resulted the conversion in composition of the GaAs layer to GaAsP.This conversion was completed within about 5 min.The alloy composition could be controlled by adjusting the composition of the Ga-As-P solution.Fairly good GaAsP layers were obtained on the transformed layer by a consecutive process of slow cooling after the annealing. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | MOCVD / MBE / CBE / AFM / STM |
| Paper # | ED93-14,CPM93-5 |
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| Conference Information | |
| Committee | ED |
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| Conference Date | 1993/5/20(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Electron Devices (ED) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Characterization of GaAs Surfaces grown by MOCVD,MBE and CBE using Atomic Force Microscopy |
| Sub Title (in English) | |
| Keyword(1) | MOCVD |
| Keyword(2) | MBE |
| Keyword(3) | CBE |
| Keyword(4) | AFM |
| Keyword(5) | STM |
| 1st Author's Name | Naohisa Inoue |
| 1st Author's Affiliation | NTT LSI Laboratories() |
| 2nd Author's Name | Jiro Osaka |
| 2nd Author's Affiliation | NTT LSI Laboratories |
| 3rd Author's Name | Kenji Ikuta |
| 3rd Author's Affiliation | NTT LSI Laboratories |
| 4th Author's Name | Haruki Yokoyama |
| 4th Author's Affiliation | NTT LSI Laboratories |
| 5th Author's Name | Hideo Sugiura |
| 5th Author's Affiliation | NTT Optoelectronics Laboratories |
| Date | 1993/5/20 |
| Paper # | ED93-14,CPM93-5 |
| Volume (vol) | vol.93 |
| Number (no) | 45 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |