| Presentation | 1993/5/20 The C-V profile of heavily Si δ-doped GaAs grown by MBE Takamasa Suzuki, Hideo Goto, Nobuhiko Sawaki, Hirosi Ito, Kunihiko Hara, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Sheet conductivity σ_□ and C-V profile of heavily Si δ-doped G aAs grown by MBE are investigated.By increasing the doping concentration from 0.4 through 4.7x10^13>cm^-2>,highest σ_□ of 19mS, _□ is obtained at 1.2x10^13>cm^-2>.Further increase of the doping decreases σ_□.The donor concentration estimated by the C- V profile suggests that the segregation of Si occurs in the highly doped samples.The narrowest C-V profile is obtained in the sample grown at 500℃ with 1.2x10^13>cm^-2> doping.The photoluminescence spectra at 4.2K shows the Si_Ga>-Si_As> donner-acceptor pair transition in samples doped more than 1.2x10^13>cm^-2>. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | δ-doped GaAs / C-V profile / Segregation / Diffusion / Photolu minescence |
| Paper # | ED93-11,CPM93-2 |
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| Conference Information | |
| Committee | ED |
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| Conference Date | 1993/5/20(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Vice Chair | |
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| Assistant | |
| Paper Information | |
| Registration To | Electron Devices (ED) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | The C-V profile of heavily Si δ-doped GaAs grown by MBE |
| Sub Title (in English) | |
| Keyword(1) | δ-doped GaAs |
| Keyword(2) | C-V profile |
| Keyword(3) | Segregation |
| Keyword(4) | Diffusion |
| Keyword(5) | Photolu minescence |
| 1st Author's Name | Takamasa Suzuki |
| 1st Author's Affiliation | Department of Electronics,School of Engineering,Nagoya University() |
| 2nd Author's Name | Hideo Goto |
| 2nd Author's Affiliation | Department of Electronics,School of Engineering,Nagoya University |
| 3rd Author's Name | Nobuhiko Sawaki |
| 3rd Author's Affiliation | Department of Electronics,School of Engineering,Nagoya University |
| 4th Author's Name | Hirosi Ito |
| 4th Author's Affiliation | Research and Development Department,Nippondenso Co.Ltd. |
| 5th Author's Name | Kunihiko Hara |
| 5th Author's Affiliation | Research and Development Department,Nippondenso Co.Ltd. |
| Date | 1993/5/20 |
| Paper # | ED93-11,CPM93-2 |
| Volume (vol) | vol.93 |
| Number (no) | 45 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |