| Presentation | 1993/5/20 Liquid-Phase Epitaxy of Lattice-Mismatched In_xGa_1-x>As Layers on (001)GaAs Substrates Shin-ichi Nakatani, Masaya Ichimura, Akira Usami, Takao Wada, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Highly-lattice-mismatched In_xGa_1-x>As layers (x>0.2) are grown on (001) GaAs substrates by liquid-phase epitaxy.Surfaces of the grown layers are rough for x largerthan 0.1.To characterize the crystallinity of the layer,we measure polarized Raman spectra and X-ray diffraction patterns after polishing and etching the surfaces.The results show that single-crystalline layers grow epitaxially even for x>0.2. The diffraction peak width increases with x in a composition range X0.9 probably because of poor quality,but it decreases for x>0.9 in spite of the large lattice mismatch. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | InGaAs / liquid-phase epitaxy / lattice mismatch / Raman scattering / X-ray diffraction |
| Paper # | ED93-10,CPM93-1 |
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| Conference Information | |
| Committee | ED |
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| Conference Date | 1993/5/20(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
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| Assistant | |
| Paper Information | |
| Registration To | Electron Devices (ED) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Liquid-Phase Epitaxy of Lattice-Mismatched In_xGa_1-x>As Layers on (001)GaAs Substrates |
| Sub Title (in English) | |
| Keyword(1) | InGaAs |
| Keyword(2) | liquid-phase epitaxy |
| Keyword(3) | lattice mismatch |
| Keyword(4) | Raman scattering |
| Keyword(5) | X-ray diffraction |
| 1st Author's Name | Shin-ichi Nakatani |
| 1st Author's Affiliation | Department of Electrical and Computer Engineering,Nagoya Institute of Technology() |
| 2nd Author's Name | Masaya Ichimura |
| 2nd Author's Affiliation | Department of Electrical and Computer Engineering,Nagoya Institute of Technology |
| 3rd Author's Name | Akira Usami |
| 3rd Author's Affiliation | Department of Electrical and Computer Engineering,Nagoya Institute of Technology |
| 4th Author's Name | Takao Wada |
| 4th Author's Affiliation | Department of Electrical and Computer Engineering,Nagoya Institute of Technology |
| Date | 1993/5/20 |
| Paper # | ED93-10,CPM93-1 |
| Volume (vol) | vol.93 |
| Number (no) | 45 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |