Presentation | 1993/10/21 Fabrication of AlGaAs/GaAs multi-quantum wires structure Shin-ichi Watabayashi, Hitomaro Tougou, Tadashi Narusawa, Yukio Toyoda, |
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Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | We have investigated the fabrication and estimation techniques of low dimensional semiconductor structures such as quantum wires(QWRs).An AlGaAs, GaAs multi-QWRs laser structure has been fabricated using new two-step etching technique and MBE regrowth. The active region of the laser has QWRs with width of 20 nm.And the QWRs widths are quite uniform in the vetical direction.A blue shift in electroluminecsence from the multi-QWRs is observed. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | quantum wire / regrowth / laser diode / MBE / AlGaAs / GaAs |
Paper # | ED93-102 |
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Committee | ED |
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Conference Date | 1993/10/21(1days) |
Place (in Japanese) | (See Japanese page) |
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Topics (in Japanese) | (See Japanese page) |
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Paper Information | |
Registration To | Electron Devices (ED) |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Fabrication of AlGaAs/GaAs multi-quantum wires structure |
Sub Title (in English) | |
Keyword(1) | quantum wire |
Keyword(2) | regrowth |
Keyword(3) | laser diode |
Keyword(4) | MBE |
Keyword(5) | AlGaAs |
Keyword(6) | GaAs |
1st Author's Name | Shin-ichi Watabayashi |
1st Author's Affiliation | Optoelectronics Technology Research() |
2nd Author's Name | Hitomaro Tougou |
2nd Author's Affiliation | Semiconductor Research Center,Matsushita Electric |
3rd Author's Name | Tadashi Narusawa |
3rd Author's Affiliation | Semiconductor Research Center,Matsushita Electric |
4th Author's Name | Yukio Toyoda |
4th Author's Affiliation | Optoelectronics Technology Research |
Date | 1993/10/21 |
Paper # | ED93-102 |
Volume (vol) | vol.93 |
Number (no) | 285 |
Page | pp.pp.- |
#Pages | 6 |
Date of Issue |