Presentation 1993/10/21
Fabrication of AlGaAs/GaAs multi-quantum wires structure
Shin-ichi Watabayashi, Hitomaro Tougou, Tadashi Narusawa, Yukio Toyoda,
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Abstract(in English) We have investigated the fabrication and estimation techniques of low dimensional semiconductor structures such as quantum wires(QWRs).An AlGaAs, GaAs multi-QWRs laser structure has been fabricated using new two-step etching technique and MBE regrowth. The active region of the laser has QWRs with width of 20 nm.And the QWRs widths are quite uniform in the vetical direction.A blue shift in electroluminecsence from the multi-QWRs is observed.
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Keyword(in English) quantum wire / regrowth / laser diode / MBE / AlGaAs / GaAs
Paper # ED93-102
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Committee ED
Conference Date 1993/10/21(1days)
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Registration To Electron Devices (ED)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Fabrication of AlGaAs/GaAs multi-quantum wires structure
Sub Title (in English)
Keyword(1) quantum wire
Keyword(2) regrowth
Keyword(3) laser diode
Keyword(4) MBE
Keyword(5) AlGaAs
Keyword(6) GaAs
1st Author's Name Shin-ichi Watabayashi
1st Author's Affiliation Optoelectronics Technology Research()
2nd Author's Name Hitomaro Tougou
2nd Author's Affiliation Semiconductor Research Center,Matsushita Electric
3rd Author's Name Tadashi Narusawa
3rd Author's Affiliation Semiconductor Research Center,Matsushita Electric
4th Author's Name Yukio Toyoda
4th Author's Affiliation Optoelectronics Technology Research
Date 1993/10/21
Paper # ED93-102
Volume (vol) vol.93
Number (no) 285
Page pp.pp.-
#Pages 6
Date of Issue