Presentation 1993/9/17
The numerical analysis of the sheet electron density dependent mobility in n-GaAs heavily doped channels
Yasuyuki Ohkura, Hiroshi Mizuta, Isao Ohbu, Osamu Kagaya, Kozo Katayama, Shigeo Ihara,
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Abstract(in English) Low field electron transport properties in heavily-doped n-GaAs channels at 300K are investigated by Monte Carlo simulation.The matrix element for electron-impurity scattering is obtained from the Fourier-transformed Coulomb potential accounting for the screening effects of the two-dimensional electron gas.Electron mobility is calculated for several values of sheet electron density and n-GaAs thickness.For low electron density,the calculated mobility increases with the sheet electron density,and is almost independent of n-GaAs thickness.For high electron density,the mobility approaches a constant value.These findings are explained as a transition from two- to three-dimensional nature for the first time,and well confirmed by our experiments.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) heavily-doped n-GaAs channels / Monte Carlo / electron mobility / impurity scattering / two-dimensional electron gas
Paper # ED93-95,SDM93-109,VLD93-50
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Committee ED
Conference Date 1993/9/17(1days)
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Registration To Electron Devices (ED)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) The numerical analysis of the sheet electron density dependent mobility in n-GaAs heavily doped channels
Sub Title (in English)
Keyword(1) heavily-doped n-GaAs channels
Keyword(2) Monte Carlo
Keyword(3) electron mobility
Keyword(4) impurity scattering
Keyword(5) two-dimensional electron gas
1st Author's Name Yasuyuki Ohkura
1st Author's Affiliation Central Research Laboratory,Hitachi Ltd()
2nd Author's Name Hiroshi Mizuta
2nd Author's Affiliation Central Research Laboratory,Hitachi Ltd
3rd Author's Name Isao Ohbu
3rd Author's Affiliation Central Research Laboratory,Hitachi Ltd
4th Author's Name Osamu Kagaya
4th Author's Affiliation Central Research Laboratory,Hitachi Ltd
5th Author's Name Kozo Katayama
5th Author's Affiliation Central Research Laboratory,Hitachi Ltd
6th Author's Name Shigeo Ihara
6th Author's Affiliation Central Research Laboratory,Hitachi Ltd
Date 1993/9/17
Paper # ED93-95,SDM93-109,VLD93-50
Volume (vol) vol.93
Number (no) 217
Page pp.pp.-
#Pages 7
Date of Issue