Presentation 1996/1/18
Ultra-High-Speed InP/InGaAs Double Heterojunction Bipolar Transistors with a New Hexagonal-Shaped Emitter
S Yamahata, K Kurishima, N Shigekawa, H Ito, Y Matsuoka,
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Abstract(in Japanese) (See Japanese page)
Abstract(in English) Superior high-frequency characteristics with peak f_T of 228 GHz and f_max of 227 GHz are demonstrated for the self-aligned InP/InGaAs double-heterojunction bipolar transistor (DHBT) with a novel collection structure and a new hexagonal emitter electrode geometry. These improvements in f_T and f_max are due to the thickness optimization of the base and collector layers and the reduction of parasitic base resistance and base/collector capacitance through the use of the new emitter geometry. Moreover, we can obtain higher f_max of over 300 GHz due to the thicker undoped InGaAs collector layer.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) InP/InGaAs DHBT / Self-aligned Process / Hexagonal-Shaped Emitter
Paper # ED95-155,MW95-140,ICD95-211
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Committee ED
Conference Date 1996/1/18(1days)
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Paper Information
Registration To Electron Devices (ED)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Ultra-High-Speed InP/InGaAs Double Heterojunction Bipolar Transistors with a New Hexagonal-Shaped Emitter
Sub Title (in English)
Keyword(1) InP/InGaAs DHBT
Keyword(2) Self-aligned Process
Keyword(3) Hexagonal-Shaped Emitter
1st Author's Name S Yamahata
1st Author's Affiliation NTT LSI Laboratories()
2nd Author's Name K Kurishima
2nd Author's Affiliation NTT LSI Laboratories
3rd Author's Name N Shigekawa
3rd Author's Affiliation NTT LSI Laboratories
4th Author's Name H Ito
4th Author's Affiliation NTT LSI Laboratories
5th Author's Name Y Matsuoka
5th Author's Affiliation Opto-electronics Laboratories
Date 1996/1/18
Paper # ED95-155,MW95-140,ICD95-211
Volume (vol) vol.95
Number (no) 449
Page pp.pp.-
#Pages 6
Date of Issue