Presentation 1996/1/17
Millimeter-wave Power HBTs with Lateral p^+/p Base Contacts
Yasushi Amamiya, Hidenori Shimawaki, Chang Woo Kim, Shin'ichi Tanaka, Seiichi Murakami, Naoki Furuhata, Masayuki Mamada, Norio Goto, Kazuhiko Honjo,
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Abstract(in Japanese) (See Japanese page)
Abstract(in English) This paper reports a further examination of AlGaAs/IGaAs HBTs with lateral P^+/P regrown base contacts which do not need a delicate processing step of base layer exposure. Compared with planar-contact HBTs, the lateral-contact (LC) HBTs has three times larger leakage current which reflects the recombination at the regrowth interface. However, a current gain above 100 and an fmax above 200 GHz are obtained for the LC HBTs with 40nm-thick graded InGaAs strained base layers. The specific contact resistance at the regrowth interface is the order of 10^<-7>Ωcm^2 for the both type contacts.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) HBT / p^+/p base contact / MOMBE selective regrowth / graded strained base layer / millimeter wave
Paper # ED95-147,MW95-132,ICD95-203
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Committee ED
Conference Date 1996/1/17(1days)
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Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Millimeter-wave Power HBTs with Lateral p^+/p Base Contacts
Sub Title (in English)
Keyword(1) HBT
Keyword(2) p^+/p base contact
Keyword(3) MOMBE selective regrowth
Keyword(4) graded strained base layer
Keyword(5) millimeter wave
1st Author's Name Yasushi Amamiya
1st Author's Affiliation Microelectronics Research Laboratories, NEC Corporation()
2nd Author's Name Hidenori Shimawaki
2nd Author's Affiliation Microelectronics Research Laboratories, NEC Corporation
3rd Author's Name Chang Woo Kim
3rd Author's Affiliation Microelectronics Research Laboratories, NEC Corporation
4th Author's Name Shin'ichi Tanaka
4th Author's Affiliation Microelectronics Research Laboratories, NEC Corporation
5th Author's Name Seiichi Murakami
5th Author's Affiliation Microelectronics Research Laboratories, NEC Corporation
6th Author's Name Naoki Furuhata
6th Author's Affiliation Microelectronics Research Laboratories, NEC Corporation
7th Author's Name Masayuki Mamada
7th Author's Affiliation Microelectronics Research Laboratories, NEC Corporation
8th Author's Name Norio Goto
8th Author's Affiliation Microelectronics Research Laboratories, NEC Corporation
9th Author's Name Kazuhiko Honjo
9th Author's Affiliation Microelectronics Research Laboratories, NEC Corporation
Date 1996/1/17
Paper # ED95-147,MW95-132,ICD95-203
Volume (vol) vol.95
Number (no) 448
Page pp.pp.-
#Pages 6
Date of Issue