Presentation 1997/1/24
High-Frequency Performance of Highly Reliable AlAs/InAs Superlattice Inserted InAlAs/InGaAs HJFETs
A Fujihara, K Onda, A Wakejima, M Mizuki, T Nakayama, H Miyamoto, Y Ando, M Kuzuhara, M Kanamori,
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Abstract(in English) Thermal stability of the InAlAs/InGaAs Heterojunction FET (HJFET) structure has been greatly improved by introducing an optimal 7 periods of AlAs(4ML)InAs(4ML) superlattice in the InAlAs Schottky layer, thus significantly reducing impurity (fluorine) incorporation in the n-InAlAs layer. The superlattice inserted transistors (SPRINT) with a 0.15μ m-gate exhibited excellent DC and RF characteristics (gm=650mS/mm @Vd=0.75V, BVgd>8V, f_T=155GHz, Fmin/Ga=0.38dB/15.8dB @12GHz) identical to a conventional InAlAs/InGaAs HJFET. These results demonstrate that the SPRINT structure, designed for reliability improvement, also exhibits excellent RF performance.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) heterojunction FET / superlattice / InAlAs / thermal stability / fluorine
Paper # ED96-203,MW96-166,IDC96-191
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Committee ED
Conference Date 1997/1/24(1days)
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Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) High-Frequency Performance of Highly Reliable AlAs/InAs Superlattice Inserted InAlAs/InGaAs HJFETs
Sub Title (in English)
Keyword(1) heterojunction FET
Keyword(2) superlattice
Keyword(3) InAlAs
Keyword(4) thermal stability
Keyword(5) fluorine
1st Author's Name A Fujihara
1st Author's Affiliation Kansai Electronics Research Laboratories, NEC Corp.()
2nd Author's Name K Onda
2nd Author's Affiliation Kansai Electronics Research Laboratories, NEC Corp.
3rd Author's Name A Wakejima
3rd Author's Affiliation Kansai Electronics Research Laboratories, NEC Corp.
4th Author's Name M Mizuki
4th Author's Affiliation Kansai Electronics Research Laboratories, NEC Corp.
5th Author's Name T Nakayama
5th Author's Affiliation Kansai Electronics Research Laboratories, NEC Corp.
6th Author's Name H Miyamoto
6th Author's Affiliation Kansai Electronics Research Laboratories, NEC Corp.
7th Author's Name Y Ando
7th Author's Affiliation Kansai Electronics Research Laboratories, NEC Corp.
8th Author's Name M Kuzuhara
8th Author's Affiliation ULSI Device Development Laboratories., NEC Corp.
9th Author's Name M Kanamori
9th Author's Affiliation Kansai Electronics Research Laboratories, NEC Corp.
Date 1997/1/24
Paper # ED96-203,MW96-166,IDC96-191
Volume (vol) vol.96
Number (no) 462
Page pp.pp.-
#Pages 6
Date of Issue