| Presentation | 1997/1/23 A 0.1μm Self-Aligned-Gate GaAs MESFET with Multilayer Interconnection Structure for Ultra-High-Speed ICs Masami Tokumitsu, Makoto Hirano, Taiichi Otsuji, Satoshi Yamaguchi, Kimiyoshi Yamasaki, |
|---|---|
| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We have developed the technologies to fabricate about 0.1-μm-gate-length GaAs MESFETs with a multilayer interconnection structure. We fabricated excellent high-frequency performance of a 0.06-μm-gate-length MESFET having current-gain cutoff frequency (fT) of 168GHz. Using 0.13μm-gate-length MESFETs, we also fabricated an ultra-high-speed decision circuit operating up to 32Gbit/s. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | WSiN / GaAs / MESFET / fT / Multilayer interconnection / Decision circuit |
| Paper # | ED96-192,MW96-155,ICD96-180 |
| Date of Issue |
| Conference Information | |
| Committee | ED |
|---|---|
| Conference Date | 1997/1/23(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Electron Devices (ED) |
|---|---|
| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | A 0.1μm Self-Aligned-Gate GaAs MESFET with Multilayer Interconnection Structure for Ultra-High-Speed ICs |
| Sub Title (in English) | |
| Keyword(1) | WSiN |
| Keyword(2) | GaAs |
| Keyword(3) | MESFET |
| Keyword(4) | fT |
| Keyword(5) | Multilayer interconnection |
| Keyword(6) | Decision circuit |
| 1st Author's Name | Masami Tokumitsu |
| 1st Author's Affiliation | NTT System Electronics Laboratories() |
| 2nd Author's Name | Makoto Hirano |
| 2nd Author's Affiliation | NTT System Electronics Laboratories |
| 3rd Author's Name | Taiichi Otsuji |
| 3rd Author's Affiliation | NTT System Electronics Laboratories |
| 4th Author's Name | Satoshi Yamaguchi |
| 4th Author's Affiliation | NTT System Electronics Laboratories |
| 5th Author's Name | Kimiyoshi Yamasaki |
| 5th Author's Affiliation | NTT System Electronics Laboratories |
| Date | 1997/1/23 |
| Paper # | ED96-192,MW96-155,ICD96-180 |
| Volume (vol) | vol.96 |
| Number (no) | 461 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |