Presentation 1996/12/13
High Current and Stabilized Field Emitter Array of Tungsten-Coated Anodized Silicon.
Akihiko HOSONO, Shinsuke YURA, Kazutoshi MORIKAWA, Shinji KAWABUCHI, Takanori OKUMURA, Shinji HORIBATA, Soichiro OKUDA, Hiroshi HARADA, Mikio TAKAI,
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Abstract(in Japanese) (See Japanese page)
Abstract(in English) Tungsten-coated anodized Si field emitter arrays (W/anodized Si FEAs) were fabricated to realize high emission current and stable operation. The emission current of the W/anodized Si FEA is proved to be 9μA/tip which is much higher than that of the conventional Si FEAs. The emission current of the W/anodized Si FEA can emit high and stable emission current higher than 15μA/tip up to 1000 hours.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) Si silicon field emitter array / anodization / Tungsten-coat / high emission current / stable operation
Paper # ED96-140
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Committee ED
Conference Date 1996/12/13(1days)
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Registration To Electron Devices (ED)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) High Current and Stabilized Field Emitter Array of Tungsten-Coated Anodized Silicon.
Sub Title (in English)
Keyword(1) Si silicon field emitter array
Keyword(2) anodization
Keyword(3) Tungsten-coat
Keyword(4) high emission current
Keyword(5) stable operation
1st Author's Name Akihiko HOSONO
1st Author's Affiliation Advanced Technology R&D Center Mitsubishi Electric Corporation()
2nd Author's Name Shinsuke YURA
2nd Author's Affiliation Advanced Technology R&D Center Mitsubishi Electric Corporation
3rd Author's Name Kazutoshi MORIKAWA
3rd Author's Affiliation Advanced Technology R&D Center Mitsubishi Electric Corporation
4th Author's Name Shinji KAWABUCHI
4th Author's Affiliation Advanced Technology R&D Center Mitsubishi Electric Corporation
5th Author's Name Takanori OKUMURA
5th Author's Affiliation Advanced Technology R&D Center Mitsubishi Electric Corporation
6th Author's Name Shinji HORIBATA
6th Author's Affiliation Advanced Technology R&D Center Mitsubishi Electric Corporation
7th Author's Name Soichiro OKUDA
7th Author's Affiliation Advanced Technology R&D Center Mitsubishi Electric Corporation
8th Author's Name Hiroshi HARADA
8th Author's Affiliation CRT Business Division Mitsubishi Electric Corporation
9th Author's Name Mikio TAKAI
9th Author's Affiliation Research Center for Materials Science at Extreme Conditions, Osaka University
Date 1996/12/13
Paper # ED96-140
Volume (vol) vol.96
Number (no) 412
Page pp.pp.-
#Pages 8
Date of Issue