Presentation | 1996/12/13 High Current and Stabilized Field Emitter Array of Tungsten-Coated Anodized Silicon. Akihiko HOSONO, Shinsuke YURA, Kazutoshi MORIKAWA, Shinji KAWABUCHI, Takanori OKUMURA, Shinji HORIBATA, Soichiro OKUDA, Hiroshi HARADA, Mikio TAKAI, |
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Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | Tungsten-coated anodized Si field emitter arrays (W/anodized Si FEAs) were fabricated to realize high emission current and stable operation. The emission current of the W/anodized Si FEA is proved to be 9μA/tip which is much higher than that of the conventional Si FEAs. The emission current of the W/anodized Si FEA can emit high and stable emission current higher than 15μA/tip up to 1000 hours. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | Si silicon field emitter array / anodization / Tungsten-coat / high emission current / stable operation |
Paper # | ED96-140 |
Date of Issue |
Conference Information | |
Committee | ED |
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Conference Date | 1996/12/13(1days) |
Place (in Japanese) | (See Japanese page) |
Place (in English) | |
Topics (in Japanese) | (See Japanese page) |
Topics (in English) | |
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Paper Information | |
Registration To | Electron Devices (ED) |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | High Current and Stabilized Field Emitter Array of Tungsten-Coated Anodized Silicon. |
Sub Title (in English) | |
Keyword(1) | Si silicon field emitter array |
Keyword(2) | anodization |
Keyword(3) | Tungsten-coat |
Keyword(4) | high emission current |
Keyword(5) | stable operation |
1st Author's Name | Akihiko HOSONO |
1st Author's Affiliation | Advanced Technology R&D Center Mitsubishi Electric Corporation() |
2nd Author's Name | Shinsuke YURA |
2nd Author's Affiliation | Advanced Technology R&D Center Mitsubishi Electric Corporation |
3rd Author's Name | Kazutoshi MORIKAWA |
3rd Author's Affiliation | Advanced Technology R&D Center Mitsubishi Electric Corporation |
4th Author's Name | Shinji KAWABUCHI |
4th Author's Affiliation | Advanced Technology R&D Center Mitsubishi Electric Corporation |
5th Author's Name | Takanori OKUMURA |
5th Author's Affiliation | Advanced Technology R&D Center Mitsubishi Electric Corporation |
6th Author's Name | Shinji HORIBATA |
6th Author's Affiliation | Advanced Technology R&D Center Mitsubishi Electric Corporation |
7th Author's Name | Soichiro OKUDA |
7th Author's Affiliation | Advanced Technology R&D Center Mitsubishi Electric Corporation |
8th Author's Name | Hiroshi HARADA |
8th Author's Affiliation | CRT Business Division Mitsubishi Electric Corporation |
9th Author's Name | Mikio TAKAI |
9th Author's Affiliation | Research Center for Materials Science at Extreme Conditions, Osaka University |
Date | 1996/12/13 |
Paper # | ED96-140 |
Volume (vol) | vol.96 |
Number (no) | 412 |
Page | pp.pp.- |
#Pages | 8 |
Date of Issue |