Presentation 1996/11/8
Fabrication of InGaAs InAlAs Quantum Wire and Quantum Dot Structures on Patterned InP Substrates by Selective Molecular Beam Epitaxy
Yuuki Hanada, Moriaki Araki, Hajime Fujikura, Hideki Hasegawa,
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Abstract(in Japanese) (See Japanese page)
Abstract(in English) InGaAs/InAlAs quantum wire and dot structures are formed by using selective MBE growth on patterned InP substrates formed by wet chemical etching and photolithography process. From the results of growth experiments using various patterned substrates, mesa stripes along <1^^-10> and <100> directions are suitable for wire formation. On the other hand, as for dot formation, mesa square having the edges parallel to <100> direction is suitable. It is also found that the uniformity of these structures depend strongly on growth conditions.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) InGaAs / patterned InP substrate / mesa / quantum wire / quantum dot / selective MBE
Paper # ED96-116
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Committee ED
Conference Date 1996/11/8(1days)
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Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Fabrication of InGaAs InAlAs Quantum Wire and Quantum Dot Structures on Patterned InP Substrates by Selective Molecular Beam Epitaxy
Sub Title (in English)
Keyword(1) InGaAs
Keyword(2) patterned InP substrate
Keyword(3) mesa
Keyword(4) quantum wire
Keyword(5) quantum dot
Keyword(6) selective MBE
1st Author's Name Yuuki Hanada
1st Author's Affiliation Research Center for Interface Quantum Electronics and Graduate School of Electronics and Information Engineering, Hokkaido University()
2nd Author's Name Moriaki Araki
2nd Author's Affiliation Research Center for Interface Quantum Electronics and Graduate School of Electronics and Information Engineering, Hokkaido University
3rd Author's Name Hajime Fujikura
3rd Author's Affiliation Research Center for Interface Quantum Electronics and Graduate School of Electronics and Information Engineering, Hokkaido University
4th Author's Name Hideki Hasegawa
4th Author's Affiliation Research Center for Interface Quantum Electronics and Graduate School of Electronics and Information Engineering, Hokkaido University
Date 1996/11/8
Paper # ED96-116
Volume (vol) vol.96
Number (no) 352
Page pp.pp.-
#Pages 8
Date of Issue