Presentation | 1996/11/8 Fabrication of InGaAs InAlAs Quantum Wire and Quantum Dot Structures on Patterned InP Substrates by Selective Molecular Beam Epitaxy Yuuki Hanada, Moriaki Araki, Hajime Fujikura, Hideki Hasegawa, |
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PDF Download Page | PDF download Page Link |
Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | InGaAs/InAlAs quantum wire and dot structures are formed by using selective MBE growth on patterned InP substrates formed by wet chemical etching and photolithography process. From the results of growth experiments using various patterned substrates, mesa stripes along <1^^-10> and <100> directions are suitable for wire formation. On the other hand, as for dot formation, mesa square having the edges parallel to <100> direction is suitable. It is also found that the uniformity of these structures depend strongly on growth conditions. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | InGaAs / patterned InP substrate / mesa / quantum wire / quantum dot / selective MBE |
Paper # | ED96-116 |
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Conference Information | |
Committee | ED |
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Conference Date | 1996/11/8(1days) |
Place (in Japanese) | (See Japanese page) |
Place (in English) | |
Topics (in Japanese) | (See Japanese page) |
Topics (in English) | |
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Assistant |
Paper Information | |
Registration To | Electron Devices (ED) |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Fabrication of InGaAs InAlAs Quantum Wire and Quantum Dot Structures on Patterned InP Substrates by Selective Molecular Beam Epitaxy |
Sub Title (in English) | |
Keyword(1) | InGaAs |
Keyword(2) | patterned InP substrate |
Keyword(3) | mesa |
Keyword(4) | quantum wire |
Keyword(5) | quantum dot |
Keyword(6) | selective MBE |
1st Author's Name | Yuuki Hanada |
1st Author's Affiliation | Research Center for Interface Quantum Electronics and Graduate School of Electronics and Information Engineering, Hokkaido University() |
2nd Author's Name | Moriaki Araki |
2nd Author's Affiliation | Research Center for Interface Quantum Electronics and Graduate School of Electronics and Information Engineering, Hokkaido University |
3rd Author's Name | Hajime Fujikura |
3rd Author's Affiliation | Research Center for Interface Quantum Electronics and Graduate School of Electronics and Information Engineering, Hokkaido University |
4th Author's Name | Hideki Hasegawa |
4th Author's Affiliation | Research Center for Interface Quantum Electronics and Graduate School of Electronics and Information Engineering, Hokkaido University |
Date | 1996/11/8 |
Paper # | ED96-116 |
Volume (vol) | vol.96 |
Number (no) | 352 |
Page | pp.pp.- |
#Pages | 8 |
Date of Issue |