| Presentation | 1997/12/12 Transition Metal Nitrides as Materials for Field Emission Cathodes Hiroshi Adachi, Hideaki Nakane, |
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| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Field emission cathodes have been examined, intending to apply for electron beam systems such as electron microscopes and electron beam exposure systems. The most important factors for such cathodes are the brightness and the stability. Field emission cathodes are very bright, but the electron emission fluctuates very much. Materials for the field emission cathode should be examined systematically in a view of stable emission. Nitride needles of transition metals of Ti, Zr, and Nb are obtained by heating the elemental metal needles in an ammonia gas atmosphere. The NbN needle gave the most stable field emission current among the nitrides examined here. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Field emission / Nitride / Transition metal nitride / Emission stability / Current fluctuation |
| Paper # | ED97-179 |
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| Conference Information | |
| Committee | ED |
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| Conference Date | 1997/12/12(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Electron Devices (ED) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Transition Metal Nitrides as Materials for Field Emission Cathodes |
| Sub Title (in English) | |
| Keyword(1) | Field emission |
| Keyword(2) | Nitride |
| Keyword(3) | Transition metal nitride |
| Keyword(4) | Emission stability |
| Keyword(5) | Current fluctuation |
| 1st Author's Name | Hiroshi Adachi |
| 1st Author's Affiliation | Department of Electrical and Electronic Engineering Muroran Institute of Technology() |
| 2nd Author's Name | Hideaki Nakane |
| 2nd Author's Affiliation | Department of Electrical and Electronic Engineering Muroran Institute of Technology |
| Date | 1997/12/12 |
| Paper # | ED97-179 |
| Volume (vol) | vol.97 |
| Number (no) | 438 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |