Presentation 1997/12/11
Diagnosis of FEAs via a fluorescent image:status quo and the next step
Hiroshi Ishizuka, Kuniyoshi Yokoyama, Hidetaka Shimawaki, Sunao Kawasaki, Akihiko Watanabe, Makoto Shiho,
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Abstract(in English) Fluorescent patterns caused by FEA-generated electron beams have been investigated. Separate images of emitting tips, observed at 1 m from the source, revealed a general feature of FEA performance; all the tips are not working evenly, beamlets are distributed on a straight line in the phase plane, etc. The pattern due to a single emitter at 2 cm was found to reflect the crystalline structure of a Si tip. An image processing system is in preparation for detailed measurements of patterns at close and long ranges. Double-gated FEAs will mainly be utilized to uncover the characteristics of FEAs in distinction from those of FEGs.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) FEA / fluorescent image / emission pattern / electron beam / aberration
Paper # ED97-170
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Committee ED
Conference Date 1997/12/11(1days)
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Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Diagnosis of FEAs via a fluorescent image:status quo and the next step
Sub Title (in English)
Keyword(1) FEA
Keyword(2) fluorescent image
Keyword(3) emission pattern
Keyword(4) electron beam
Keyword(5) aberration
1st Author's Name Hiroshi Ishizuka
1st Author's Affiliation Fukuoka Institute of Technology()
2nd Author's Name Kuniyoshi Yokoyama
2nd Author's Affiliation Research Institute of Electrical Communication, Tohoku University
3rd Author's Name Hidetaka Shimawaki
3rd Author's Affiliation Research Institute of Electrical Communication, Tohoku University
4th Author's Name Sunao Kawasaki
4th Author's Affiliation Department of Physics, Saitama University
5th Author's Name Akihiko Watanabe
5th Author's Affiliation Japan Atomic Energy Research Institute
6th Author's Name Makoto Shiho
6th Author's Affiliation Japan Atomic Energy Research Institute
Date 1997/12/11
Paper # ED97-170
Volume (vol) vol.97
Number (no) 437
Page pp.pp.-
#Pages 8
Date of Issue