| Presentation | 1997/7/15 Wafer-scale Nano-fabrication using Single-Ion-Implantation and Electrochemical Process Ken-ichi Hara, Iwao Ohdomari, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | For the fabrication of nano-structures in wafer scale, we have started to combine Single Ion Implantation and electrochemical process. In this work we have tried to investigate the preferential deposition site for various metals on Si(111) surfaces well defined by a wet treatment. For the silicon surface immersed in the Cu-dissolved solution, the AFM images shows that the Cu deposition occurred only at the step-edges, while for Fe and Ni, nothing was observed on the silicon surfaces. These results can be explained by the redox potentials proper to the metal elements. In order to see the atomic scale process for Cu deposition at the step edges, in-situ EC-STM observation is now under preparation. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | wet-technology / nanostructure / surface cleaning / H-terminated Si(111) / redox potential |
| Paper # | ED97-80 |
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| Conference Information | |
| Committee | ED |
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| Conference Date | 1997/7/15(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
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| Paper Information | |
| Registration To | Electron Devices (ED) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Wafer-scale Nano-fabrication using Single-Ion-Implantation and Electrochemical Process |
| Sub Title (in English) | |
| Keyword(1) | wet-technology |
| Keyword(2) | nanostructure |
| Keyword(3) | surface cleaning |
| Keyword(4) | H-terminated Si(111) |
| Keyword(5) | redox potential |
| 1st Author's Name | Ken-ichi Hara |
| 1st Author's Affiliation | School of Science and Engineering, Waseda University() |
| 2nd Author's Name | Iwao Ohdomari |
| 2nd Author's Affiliation | School of Science and Engineering, Waseda University:Kagami Memorial Laboratory for Material Science and Technology, Waseda University |
| Date | 1997/7/15 |
| Paper # | ED97-80 |
| Volume (vol) | vol.97 |
| Number (no) | 159 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |