| Presentation | 1997/7/15 Atomic-scale imaging of compound semiconductors with a noncontact atomic force microscope Seizo Morita, Yasuhiro Sugawara, Takayuki Uchihashi, Hitoshi Ueyama, Takahiro Tsukamoto, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Recently, using a noncontact ultrahigh vacuum atomic force microscope (UHV-AFM) developed by our group, atomic-scale point defects on compound semiconductor surfaces were observed for the first time. Besides, motion of point defects, point defects with different depths were observed. Further, atomically resolved imagings under the repulsive force in the contact region as well as under the attractive force in the noncontact region were successfully achieved. In the present report, the latest results including ovservations of Si semiconductor surfaces and electrostatic force imaging of point charge in the thin silicon oxide will be presented. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | noncontact / UHV-MM / compound semiconductor / atomic resolution / point defect |
| Paper # | ED97-76 |
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| Conference Information | |
| Committee | ED |
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| Conference Date | 1997/7/15(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Electron Devices (ED) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Atomic-scale imaging of compound semiconductors with a noncontact atomic force microscope |
| Sub Title (in English) | |
| Keyword(1) | noncontact |
| Keyword(2) | UHV-MM |
| Keyword(3) | compound semiconductor |
| Keyword(4) | atomic resolution |
| Keyword(5) | point defect |
| 1st Author's Name | Seizo Morita |
| 1st Author's Affiliation | Department of Electronic Engineering, Faculty of Engineering, Osaka University() |
| 2nd Author's Name | Yasuhiro Sugawara |
| 2nd Author's Affiliation | Department of Electronic Engineering, Faculty of Engineering, Osaka University |
| 3rd Author's Name | Takayuki Uchihashi |
| 3rd Author's Affiliation | Department of Electronic Engineering, Faculty of Engineering, Osaka University |
| 4th Author's Name | Hitoshi Ueyama |
| 4th Author's Affiliation | Department of Electronic Engineering, Faculty of Engineering, Osaka University |
| 5th Author's Name | Takahiro Tsukamoto |
| 5th Author's Affiliation | Department of Electronic Engineering, Faculty of Engineering, Osaka University |
| Date | 1997/7/15 |
| Paper # | ED97-76 |
| Volume (vol) | vol.97 |
| Number (no) | 159 |
| Page | pp.pp.- |
| #Pages | 8 |
| Date of Issue | |