| Presentation | 2001/10/19 Hydrogen Addition Effect on SiGe Growth by Ion-Beam Sputter Technique K. Sasaki, T. Ikeda, Y. Takahashi, T. Hata, |
|---|---|
| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Effect of hydrogen on SiGe thin film preparation by ion-beam sputter technique is discussed. Using this technique well-controlled and reproducible film thickness is obtained. Ge segregates on the surface of overlaying Si layer and is mixed with the Si, so that it is impossible to obtain a abrupt Si/Ge heterointerface. This segregation was suppressed effectively by the surfactant effect of introducing hydrogen, however crystallinity of Si was found to degrade. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Ion-beam sputter / SiGe / surface segregation / hydrogen surfactant |
| Paper # | CPM2001-108 |
| Date of Issue |
| Conference Information | |
| Committee | CPM |
|---|---|
| Conference Date | 2001/10/19(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Component Parts and Materials (CPM) |
|---|---|
| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Hydrogen Addition Effect on SiGe Growth by Ion-Beam Sputter Technique |
| Sub Title (in English) | |
| Keyword(1) | Ion-beam sputter |
| Keyword(2) | SiGe |
| Keyword(3) | surface segregation |
| Keyword(4) | hydrogen surfactant |
| 1st Author's Name | K. Sasaki |
| 1st Author's Affiliation | Faculty of Engineering/Graduate School of Science and Technology() |
| 2nd Author's Name | T. Ikeda |
| 2nd Author's Affiliation | Faculty of Engineering/Graduate School of Science and Technology |
| 3rd Author's Name | Y. Takahashi |
| 3rd Author's Affiliation | Faculty of Engineering/Graduate School of Science and Technology |
| 4th Author's Name | T. Hata |
| 4th Author's Affiliation | Faculty of Engineering/Graduate School of Science and Technology |
| Date | 2001/10/19 |
| Paper # | CPM2001-108 |
| Volume (vol) | vol.101 |
| Number (no) | 395 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |