| Presentation | 2001/10/19 Characteristics of N_2 and NH_3 Plasmas Excited by a Helical Antenna and the Properities of Surface Layer of GaAs Nitrided by Them Kentarou KUMAZAWA, Taturou ARAYAMA, Shin'ichirou OKA, Kanji YASUI, Tadashi AKAHANE, |
|---|---|
| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | The characteristics of ammonia(NH_3) plasma generated by a helical antenna were compared with those of nitrogen(N_2) plasma. The high density H atoms and NH radicals, which are expected to terminate the defects, were generated in the NH_3 plasma from the optical emisson spectroscopy. The nitridation of GaAs surface was performed using the both plasmas, and the properties of the nitrided surface layer were cmpared. The contamination with oxygen in the nitridation layer by NH_3 plasma was reduced compared to that by N_2 plasma. From C-V characteristics, the interface state density was also reduced by the nitridation using the high-density NH_3 plasma. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Helical antenna / mitridation layer / nitrogen plasma / ammonia plasma |
| Paper # | CPM2001-101 |
| Date of Issue |
| Conference Information | |
| Committee | CPM |
|---|---|
| Conference Date | 2001/10/19(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Component Parts and Materials (CPM) |
|---|---|
| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Characteristics of N_2 and NH_3 Plasmas Excited by a Helical Antenna and the Properities of Surface Layer of GaAs Nitrided by Them |
| Sub Title (in English) | |
| Keyword(1) | Helical antenna |
| Keyword(2) | mitridation layer |
| Keyword(3) | nitrogen plasma |
| Keyword(4) | ammonia plasma |
| 1st Author's Name | Kentarou KUMAZAWA |
| 1st Author's Affiliation | Department of Engineering, Nagaoka University of Technology() |
| 2nd Author's Name | Taturou ARAYAMA |
| 2nd Author's Affiliation | Department of Engineering, Nagaoka University of Technology |
| 3rd Author's Name | Shin'ichirou OKA |
| 3rd Author's Affiliation | Department of Engineering, Nagaoka University of Technology |
| 4th Author's Name | Kanji YASUI |
| 4th Author's Affiliation | Department of Engineering, Nagaoka University of Technology |
| 5th Author's Name | Tadashi AKAHANE |
| 5th Author's Affiliation | Department of Engineering, Nagaoka University of Technology |
| Date | 2001/10/19 |
| Paper # | CPM2001-101 |
| Volume (vol) | vol.101 |
| Number (no) | 395 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |