| Presentation | 2001/10/19 Single-Sided or Double-Sided Grooved Type Resonators Manufactured by Chemical Etching Processes of two or more steps Yoshiaki Nagaura, Kumiko Nagaura, Zen-ichiro Nagaura, Kazuhiro Kinoshita, Kazutaka Nagato, Kyohei Emoto, Kazutake Imani, Motomu Murata, Seiichi Yokomizo, Mitzuo Nakazawa, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We produced two steps shaped single-sided grooved type resonators by chemical etching processes. Its purpose is to avoid anisotropy of quartz-and obtain resonators of optimal structures having an aperture ratio 80 to 1 (d/t) regardless of thickness of quartz wafers. Further, we lapped quartz blanks whose one side are two steps groove shapes with applying pressure on both of their upper and lower sides by using a dual-face lapping machine in order to improve its electrical characteristics, we succeeded in producing convex lens-shape single-sided grooved type quartz resonators by their flexure phenomena. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | two steps groove shape / stairway shape / single-Sided / double-sided / inverted Mesa type / grooved type / plano-convex / concavo-convex / convex lens shape |
| Paper # | CPM2001-95 |
| Date of Issue |
| Conference Information | |
| Committee | CPM |
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| Conference Date | 2001/10/19(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Component Parts and Materials (CPM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Single-Sided or Double-Sided Grooved Type Resonators Manufactured by Chemical Etching Processes of two or more steps |
| Sub Title (in English) | |
| Keyword(1) | two steps groove shape |
| Keyword(2) | stairway shape |
| Keyword(3) | single-Sided |
| Keyword(4) | double-sided |
| Keyword(5) | inverted Mesa type |
| Keyword(6) | grooved type |
| Keyword(7) | plano-convex |
| Keyword(8) | concavo-convex |
| Keyword(9) | convex lens shape |
| 1st Author's Name | Yoshiaki Nagaura |
| 1st Author's Affiliation | Nagaura Lab., Inc.() |
| 2nd Author's Name | Kumiko Nagaura |
| 2nd Author's Affiliation | Nagaura Lab., Inc. |
| 3rd Author's Name | Zen-ichiro Nagaura |
| 3rd Author's Affiliation | Nagaura Lab., Inc. |
| 4th Author's Name | Kazuhiro Kinoshita |
| 4th Author's Affiliation | Nagaura Lab., USA |
| 5th Author's Name | Kazutaka Nagato |
| 5th Author's Affiliation | Nagaura Lab., Inc. |
| 6th Author's Name | Kyohei Emoto |
| 6th Author's Affiliation | Nagaura Lab., Inc. |
| 7th Author's Name | Kazutake Imani |
| 7th Author's Affiliation | Nagaura Lab., Inc. |
| 8th Author's Name | Motomu Murata |
| 8th Author's Affiliation | Nagaura Lab., Inc. |
| 9th Author's Name | Seiichi Yokomizo |
| 9th Author's Affiliation | Industry Technology Center of Okayama Pref. |
| 10th Author's Name | Mitzuo Nakazawa |
| 10th Author's Affiliation | Shinshu University |
| Date | 2001/10/19 |
| Paper # | CPM2001-95 |
| Volume (vol) | vol.101 |
| Number (no) | 395 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |