Presentation 2001/10/19
Manufacturing by Chemical Etching Process for The Super-Thin Grooved : Type AT-cut Quartz Crystal Resonators, And The Resonance Frequency Characteristics
Takehiko Ariizumi, Katsutoshi Iinuma, Kouchi Tanaka, Katsuhiko Ariizumi, Mitsuo Nakazawa,
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Abstract(in Japanese) (See Japanese page)
Abstract(in English) We have aimed at the development of the high frequency super-thin grooved (inverse mesa-type)AT-cut quartz crystal resonators with excellent frequency temperature characteristics that act gently for ecology. In this paper, we represent both the precision manufacturing by chemical etching process and the resonance frequency characteristics for the AT-cut grooved-type quartz crystal resonators.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) AT-cut quartz crystal resonators / super-thin grooved resonator / excellent frequency temperature characteristics / resonance frequency characteristics / inverse mesa-type / high frequency
Paper # CPM2001-92
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Committee CPM
Conference Date 2001/10/19(1days)
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Registration To Component Parts and Materials (CPM)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Manufacturing by Chemical Etching Process for The Super-Thin Grooved : Type AT-cut Quartz Crystal Resonators, And The Resonance Frequency Characteristics
Sub Title (in English)
Keyword(1) AT-cut quartz crystal resonators
Keyword(2) super-thin grooved resonator
Keyword(3) excellent frequency temperature characteristics
Keyword(4) resonance frequency characteristics
Keyword(5) inverse mesa-type
Keyword(6) high frequency
1st Author's Name Takehiko Ariizumi
1st Author's Affiliation Global Co.Ltd.()
2nd Author's Name Katsutoshi Iinuma
2nd Author's Affiliation Global Co.Ltd.
3rd Author's Name Kouchi Tanaka
3rd Author's Affiliation Global Co.Ltd.
4th Author's Name Katsuhiko Ariizumi
4th Author's Affiliation Global Co.Ltd.
5th Author's Name Mitsuo Nakazawa
5th Author's Affiliation Shinshu University
Date 2001/10/19
Paper # CPM2001-92
Volume (vol) vol.101
Number (no) 395
Page pp.pp.-
#Pages 7
Date of Issue