Presentation | 2001/10/19 Manufacturing by Chemical Etching Process for The Super-Thin Grooved : Type AT-cut Quartz Crystal Resonators, And The Resonance Frequency Characteristics Takehiko Ariizumi, Katsutoshi Iinuma, Kouchi Tanaka, Katsuhiko Ariizumi, Mitsuo Nakazawa, |
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PDF Download Page | PDF download Page Link |
Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | We have aimed at the development of the high frequency super-thin grooved (inverse mesa-type)AT-cut quartz crystal resonators with excellent frequency temperature characteristics that act gently for ecology. In this paper, we represent both the precision manufacturing by chemical etching process and the resonance frequency characteristics for the AT-cut grooved-type quartz crystal resonators. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | AT-cut quartz crystal resonators / super-thin grooved resonator / excellent frequency temperature characteristics / resonance frequency characteristics / inverse mesa-type / high frequency |
Paper # | CPM2001-92 |
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Conference Information | |
Committee | CPM |
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Conference Date | 2001/10/19(1days) |
Place (in Japanese) | (See Japanese page) |
Place (in English) | |
Topics (in Japanese) | (See Japanese page) |
Topics (in English) | |
Chair | |
Vice Chair | |
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Assistant |
Paper Information | |
Registration To | Component Parts and Materials (CPM) |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Manufacturing by Chemical Etching Process for The Super-Thin Grooved : Type AT-cut Quartz Crystal Resonators, And The Resonance Frequency Characteristics |
Sub Title (in English) | |
Keyword(1) | AT-cut quartz crystal resonators |
Keyword(2) | super-thin grooved resonator |
Keyword(3) | excellent frequency temperature characteristics |
Keyword(4) | resonance frequency characteristics |
Keyword(5) | inverse mesa-type |
Keyword(6) | high frequency |
1st Author's Name | Takehiko Ariizumi |
1st Author's Affiliation | Global Co.Ltd.() |
2nd Author's Name | Katsutoshi Iinuma |
2nd Author's Affiliation | Global Co.Ltd. |
3rd Author's Name | Kouchi Tanaka |
3rd Author's Affiliation | Global Co.Ltd. |
4th Author's Name | Katsuhiko Ariizumi |
4th Author's Affiliation | Global Co.Ltd. |
5th Author's Name | Mitsuo Nakazawa |
5th Author's Affiliation | Shinshu University |
Date | 2001/10/19 |
Paper # | CPM2001-92 |
Volume (vol) | vol.101 |
Number (no) | 395 |
Page | pp.pp.- |
#Pages | 7 |
Date of Issue |