Presentation | 2001/7/26 Optical and electrical characteristics of Ge nanocrystals in SiO_2 film Shin-ichi MATSUNAGA, Hisashi FUKUDA, Shigeru NOMURA, Motokazu NISHINO, |
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Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | The purpose of this study is the application to nanocrystal memory noticed as a non-volatility memory of next generation. We made germanium(Ge) nanocrystals self-assembled in silicon dioxide(SiO_2)film by metalorganic decomposition(MOD)method, and investigated their crystallinities and electrical characteristics. When Ge is diffused and heat-treated, it self-assembles in SiO_2 finally changes to nano-size crystals. The size of Ge nanocrystal obtained in this study was estimated in the range of 3 to 5nm from the result of Raman spectroscopy measurement. Blue light emission from the growth of Ge nanocrystals was observed at room temperature from the result of photoluminescence(PL)measurement. Moreover, the flat-band voltage of C-V characteristics certainly changed by the electron-injection to SiO_2/Ge/SiO_2 quantum well. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | nanocrystal memory / SiO_2 film / Ge nanocrystal / blue light emission |
Paper # | CPM2001-144 |
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Conference Information | |
Committee | CPM |
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Conference Date | 2001/7/26(1days) |
Place (in Japanese) | (See Japanese page) |
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Paper Information | |
Registration To | Component Parts and Materials (CPM) |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Optical and electrical characteristics of Ge nanocrystals in SiO_2 film |
Sub Title (in English) | |
Keyword(1) | nanocrystal memory |
Keyword(2) | SiO_2 film |
Keyword(3) | Ge nanocrystal |
Keyword(4) | blue light emission |
1st Author's Name | Shin-ichi MATSUNAGA |
1st Author's Affiliation | Department of Electrical and Electronic Engineering, Faculty of Engineering, Muroran Institute of Technology() |
2nd Author's Name | Hisashi FUKUDA |
2nd Author's Affiliation | Department of Electrical and Electronic Engineering, Faculty of Engineering, Muroran Institute of Technology |
3rd Author's Name | Shigeru NOMURA |
3rd Author's Affiliation | Department of Electrical and Electronic Engineering, Faculty of Engineering, Muroran Institute of Technology |
4th Author's Name | Motokazu NISHINO |
4th Author's Affiliation | Hokkaido Polytechnic College |
Date | 2001/7/26 |
Paper # | CPM2001-144 |
Volume (vol) | vol.101 |
Number (no) | 244 |
Page | pp.pp.- |
#Pages | 6 |
Date of Issue |