Presentation 2001/7/26
Optical and electrical characteristics of Ge nanocrystals in SiO_2 film
Shin-ichi MATSUNAGA, Hisashi FUKUDA, Shigeru NOMURA, Motokazu NISHINO,
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Abstract(in English) The purpose of this study is the application to nanocrystal memory noticed as a non-volatility memory of next generation. We made germanium(Ge) nanocrystals self-assembled in silicon dioxide(SiO_2)film by metalorganic decomposition(MOD)method, and investigated their crystallinities and electrical characteristics. When Ge is diffused and heat-treated, it self-assembles in SiO_2 finally changes to nano-size crystals. The size of Ge nanocrystal obtained in this study was estimated in the range of 3 to 5nm from the result of Raman spectroscopy measurement. Blue light emission from the growth of Ge nanocrystals was observed at room temperature from the result of photoluminescence(PL)measurement. Moreover, the flat-band voltage of C-V characteristics certainly changed by the electron-injection to SiO_2/Ge/SiO_2 quantum well.
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Keyword(in English) nanocrystal memory / SiO_2 film / Ge nanocrystal / blue light emission
Paper # CPM2001-144
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Committee CPM
Conference Date 2001/7/26(1days)
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Registration To Component Parts and Materials (CPM)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Optical and electrical characteristics of Ge nanocrystals in SiO_2 film
Sub Title (in English)
Keyword(1) nanocrystal memory
Keyword(2) SiO_2 film
Keyword(3) Ge nanocrystal
Keyword(4) blue light emission
1st Author's Name Shin-ichi MATSUNAGA
1st Author's Affiliation Department of Electrical and Electronic Engineering, Faculty of Engineering, Muroran Institute of Technology()
2nd Author's Name Hisashi FUKUDA
2nd Author's Affiliation Department of Electrical and Electronic Engineering, Faculty of Engineering, Muroran Institute of Technology
3rd Author's Name Shigeru NOMURA
3rd Author's Affiliation Department of Electrical and Electronic Engineering, Faculty of Engineering, Muroran Institute of Technology
4th Author's Name Motokazu NISHINO
4th Author's Affiliation Hokkaido Polytechnic College
Date 2001/7/26
Paper # CPM2001-144
Volume (vol) vol.101
Number (no) 244
Page pp.pp.-
#Pages 6
Date of Issue